In Situ Metrology for Adaptive X-Ray Optics with an Absolute Distance Measuring Sensor Array

V. G. Badami,E. Abruna,L. Huang,M. Idir
DOI: https://doi.org/10.1063/1.5060954
2019-01-01
AIP Conference Proceedings
Abstract:Adaptive x-ray mirrors are emerging as one of the primary solutions for meeting the performance needs of the next generation of x-ray light sources. Currently, these mirrors operate open loop with intermittent feedback from invasive sensors that measure the beam quality. This paper outlines a novel design for real-time in situ metrology of the shape of these mirrors using an array of interferometric sensors that does not interrupt the x-ray beam. We describe a proof-of-principle demonstration which shows sub-nm agreement over a range of mirror deflection magnitudes and shapes as compared to simultaneous measurements by using a large-aperture Fizeau interferometer.
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