Abstract:After years of development from a concept to early experimental stage, X-ray Deformable Mirrors (XDMs) are used in many synchrotron/free-electron laser facilities as a standard x-ray optics tool. XDM is becoming an integral part of the present and future large x-ray and EUV projects and will be essential in exploiting the full potential of the new sources currently under construction. The main objective of using XDMs is to correct wavefront errors or to enable variable focus beam sizes at the sample. Due to the coupling among the N actuators of a DM, it is usually necessary to perform a calibration or training process to drive the DM into the target shape. Commonly, in order to optimize the actuators settings to minimize slope/height errors, an initial measurement need to be collected, with all actuators set to 0, and then either N or 2N measurements are necessary learn each actuator behavior sequentially. In total, it means that N+1 or 2N+1 scans are required to perform this learning process. When the actuators number N is important and the actuator response or the necessary metrology is slow then this learning process can be time consuming. In this work, we present a fast and accurate method to drive an x-ray active bimorph mirror to a target shape with only 3 or 4 measurements. Instead of sequentially measuring and calculating the influence functions of all actuators and then predicting the voltages needed for any desired shape, the metrology data are directly used to "guide" the mirror from its current status towards the particular target slope/height via iterative compensations. The feedback for the iteration process is the discrepancy in curvature calculated by using B-spline fitting of the measured height/slope data. In this paper, the feasibility of this simple and effective approach is demonstrated with experiments.

At‐wavelength metrology of an X‐ray mirror using a downstream wavefront modulator

Interferometry Measurement Of Parallel Optical Plate Wavefront

Sub-wavefront Slope Measurement Based on Talbot Effect Moiré Fringe Technology

Nano-precision metrology of X-ray mirrors with laser speckle angular measurement

Surface Form Metrology of Micro-Optics

Group Delay Dispersion Measurement of a Dispersive Mirror by Spectral Interferometry: Comparison of Different Signal Processing Algorithms.

New Scheme to Control X-Ray Deformable Mirrors

Wavefront Sensing and Surface Shape Measurement Based on Microfocus X-Ray Grating Interferometer

Control X-Ray Deformable Mirrors with Few Measurements

Multi-pitch Nano-Accuracy Surface Profiler for Strongly Curved X-ray Mirror Metrology

A method to specify X-ray mirrors for nanoprobe beamlines

Study of the relationship between metrological characterization and angular resolution in grazing-incidence X-ray optics

Optics Metrology and At-Wavelength Wavefront Characterization by a Microfocus X-ray Grating Interferometer.

X-ray wavefront sensing and optics metrology using a microfocus x-ray grating interferometer with electromagnetic phase stepping

In Situ Metrology for Adaptive X-Ray Optics with an Absolute Distance Measuring Sensor Array

Controlling X-ray Deformable Mirrors During Inspection.

Quantitative X-ray Channel-Cut Crystal Diffraction Wavefront Metrology Using the Speckle Scanning Technique

Multi-pitch Self-Calibration Measurement Using a Nano-Accuracy Surface Profiler for X-ray Mirror Metrology.

X-ray Wavefront Characterization with Grating Interferometry Using an X-Ray Microfocus Laboratory Source

Simulation and an Experimental Study on the Optical Performance of a Wolter-I Focusing Mirror Based on a 3D Ray Tracing Algorithm.

A First-Principle Approach to X-ray Active Optics: Design and Verification