The multiple array detector optical lever deflection angle metrology for x-ray mirrors, and semiconductor applications

Wojtek J. Walecki
DOI: https://doi.org/10.1117/12.3000238
2023-10-03
Abstract:We present concept of the optical level deflection family of angle sensors capable of measuring deflection angle in range 0 – 0.15 rad with repeatability better than 10 nrad, and spot size of the order of 1 mm. The sensor family employs a set modern array detector. We derive an analytical formula describing shot noise level of the sensor and confirm it by numerical simulations. We find that for light beam spot size sufficiently larger than detector pixel size, and much smaller than array the shott noise does not depend on the spot size.
Engineering,Physics
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