Design and Realization of New Optical Sequential Readout for Micro-cantilever Array

Chang-guo XUE,Guang-ping ZHANG,Qing-chuan ZHANG,Xiao-ping WU
2011-01-01
Abstract:As an emerging hotspot of MEMS technology and NEMS sensor over past decades,the research of instrument style of micro-cantilever sensor was developed from single cantilever to one-dimensional or two-dimensional arrays.A new optical sequential readout for micro-cantilever array is presented in this paper,based on a commercialized micro-cantilever array with 250μm spacing.Using high precision two-dimensional optical displacement table to adjust the laser position and locate two laser beams on the adjacent micro-cantilever array tips as parallel beams on micro-distance,the bend of two micro-cantilevers was detected by PSD.Thus the system sensor function was realized.This optical path is easy put up in experiment verification and two signals from two micro-cantilevers can be better separated.When an antibody was immobilized on the surface of a micro-cantilever,the system can detect the antigen in solution.This method provided a simple way to design micro-cantilever array based on optical lever in the future.
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