Review on Micro-cantilever Array Based MEMS Technics Optical-eadout IR Imaging

Hai-tao SHI,Yi OU,DA-peng CHEN,Qing-chuan ZHANG,Xiao-ping WU,Bin-bin JIAO,Chao-bo LI,Xiao-Guang LUO,Chun-juan YOU
DOI: https://doi.org/10.3969/j.issn.1004-4507.2007.01.002
2007-01-01
Abstract:Uncool IR imaging technology, because of its low cost and high credibility, has attracted more and more attention. Recently a sort of IR imaging system consisting of micro-cantilever array and optical-readout device is presented. This paper discusses its imaging principle, influence factor. Finally, it indicates the way this kind of devices will follow.
What problem does this paper attempt to address?