Abstract:This paper describes a novel single-layer bi-material cantilever microstructure without silicon (Si) substrate for focal plane array (FPA) application in uncooled optomechanical infrared imaging system (UOIIS). The UOIIS, responding to the radiate infrared (IR) source with spectral range from 8 to 14μm, may receive an IR image through visible optical readout method. The temperature distribution of the IR source could be obtained by measuring the thermal–mechanical rotation angle distribution of every pixel in the cantilever array, which is consisted of two materials with mismatching thermal expansion coefficients. In order to obtain a high detection to the IR object, gold (Au) film is coated alternately on silicon nitride (SiNx) film in the flection beams of the cantilevers. And a thermal–mechanical model for such cantilever microstructure is proposed. The thermal and thermal–mechanical coupling field characteristics of the cantilever array structure are optimized through numerical analysis method and simulated by using the finite element simulation method. The thermal–mechanical rotation angle simulated and thermal–mechanical sensitivity tested in the experiment are 2.459×10−3 and 3.322×10−4rad/K, respectively, generally in good agreement with what the thermal–mechanical model and numerical analysis forecast, which offers an effective reference for FPA structure parameters design in UOIIS.

Performance Analysis and Optimization of Optical-Readout of Microcantilever Array Infrared Imaging

Optical Sensitivity Analysis Of Deformed Mirrors For Microcantilever Array Ir Imaging

Optical Readout Method for Microcantilever Array Sensing and Its Sensitivity Analysis.

Performance Analysis of Microcantilever Arrays for Optical Readout Uncooled Infrared Imaging

The Influence of Mirror Curvature on Optical Detection Sensitivity in Optomechanical Uncooled IR Detectors

Optical sensitivity analysis of a bent micro reflector array in uncooled infrared imaging

Design Optimization and Performance Analysis of Deformed Optical Readout Focal Plane Array

Machining and functional testing of adaptive micro-mirror array

Analysis and Optimization of a Novel Laterally Deformable Optical NEMS Grating Transducer

Uncooled Infrared Imaging Device Based on Optimized Optomechanical Micro-Cantilever Array

Optimal design of optomechanical uncooled infrared focal plane array with integrated metalens

Shape Distortions of Infrared Focal Plane Array and Optical Readout

Optimized Optomechanical Micro-Cantilever Array for Uncooled Infrared Imaging

Holographic Compensation-Based Optical Readout Technique For Microcantilever Ir Image System

Effect of Reflector Deformation on Optical Detection Sensitivity for Optical Readout Infrared Imaging System

Design, simulation and validation of a novel uncooled infrared focal plane array

Optical readout method based on a narrow-strip filter for microcantilever array sensing.

Short-Wave Infrared, Medium-Wave Infrared, and Long-Wave Infrared Imaging Study for Optical Readout Microcantilever Array Infrared Sensing System

Optical Sensitivity Non-Uniformity Analysis and Optimization of A Tilt Optical Readout Focal Plane Array

Uncooled IR imaging using optomechanical detectors

Analysis of Optical Readout Sensitivity for Uncooled Infrared Detector