The Influence of Mirror Curvature on Optical Detection Sensitivity in Optomechanical Uncooled IR Detectors

Zheng-yu MIAO,Qing-chuan ZHANG,Xiao-ping WU,Da-peng CHEN,Zhe-ying GUO,Feng-liang DONG,Zhi-ming XIONG,Chao-bo LI,Bin-bin JIAO
DOI: https://doi.org/10.3969/j.issn.1001-4888.2007.03.019
2007-01-01
Abstract:This paper discusses the influence of micromirror curvature on optical sensitivity in optomechanical uncooled infrared (IR) detectors. An uncooled IR Focal Plane Array (FPA) containing bimaterial microcantilever arrays is fabricated using a silicon bulk micromachining technique. The fabricated FPA is curved due to the residual stress caused in the microfabrication process. The stress-induced mirror curvature can degrade the optical detection sensitivity of these optical readout detectors. The influence of the curvature is modeled theoretically by Fourier optics and validated experimentally. The optical detection sensitivity is decreased to 40% of the ideal value when the mirror has a curvature of 0.1mm-1. Finally, this analysis method is used to evaluate the improvement of optical performance of FPA after curvature modification.
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