MEMS Based Optomechanical Infrared Imaging

潘亮,张青川,伍小平,段志辉,陈大鹏,王玮冰,郭哲颖

DOI: https://doi.org/10.3969/j.issn.1001-4888.2004.04.002

2004-01-01

Abstract:IR imaging using uncooled IR camera has received intensive interests because of its advantages of cost, weight, and reliability over cooled electro-optic camera. Recently, uncooled thermo-mechanical IR camera has been developed into a potential low-cost and yet high-resolution instrument for various applications. In this paper, a new type IR detector with an optical readout system is developed. The IR detector contains a focus plane array (FPA) which is fabricated into an array of bi-material microcantilevers in the form of single-layer membranous structure without Si-base. Each of the bi-material microcantilevers on the FPA independently converts the incident IR flux into the optical readable thermal-mechanical deformation. It doesn′t require integrated circuit, vacuum chamber and cryogenic cooler while promises to get high sensitivity and approach its cooled counterpart. So the cost and fabrication difficulty would be greatly decreased. The fabricated FPA is a single-layer membranous structure without Si-base with 150×100 pixels (cantilevers), and the cantilever size is 200μm×100×2μm. A thermal image of about 500K has been obtained with the assembled IR detector system with sampling rate of 12 frames per second.