Abstract:Stitching interferometry is performed by collecting interferometric data from overlapped sub-apertures and stitching these data together to provide a full surface map. The propagation of the systematic error in the measured subset data is one of the main error sources in stitching interferometry for accurate reconstruction of the surface topography. In this work, we propose, using the redundancy of the captured subset data, two types of two-dimensional (2D) self-calibration stitching algorithms to overcome this issue by in situ estimating the repeatable high-order additive systematic errors, especially for the application of measuring X-ray mirrors. The first algorithm, called CS short for "Calibrate, and then Stitch", calibrates the high-order terms of the reference by minimizing the de-tilted discrepancies of the overlapped subsets and then stitches the reference-subtracted subsets. The second algorithm, called SC short for "Stitch, and then Calibrate", stitches a temporarily result and then calibrates the reference from the de-tilted discrepancies of the measured subsets and the temporarily stitched result. In the implementation of 2D scans in x- and y-directions, step randomization is introduced to generate nonuniformly spaced subsets which can diminish the periodic stitching errors commonly observed in evenly spaced subsets. The regularization on low-order terms enables a highly flexible option to add the curvature and twist acquired by another system. Both numerical simulations and experiments are carried out to verify the proposed method. All the results indicate that 2D high-order repeatable additive systematic errors can be retrieved from the 2D redundant overlapped data in stitching interferometry.

Influence of Alignment Error and Random Noise on Interferometry Flat Sub-Aperture Stitching

Elimination of reference surface error on high-accuracy subaperture stitching

Error Analysis of Sub-Aperture Synthesis for Detecting Surface Defects of Optical Components

Aspheric Subaperture Stitching Based on System Modeling.

Error Analysis of Spherical Scanning Mechanism Used for Surface Defects Detection

Aspheric and Free-Form Surfaces Test with Non-Null Sub-Aperture Stitching

Non-null Annular Subaperture Stitching Interferometry for Aspheric Testing

Alignment Methods for Micron-Scale Surface Defects Automatic Evaluation of Large-Aperture Fine Optics

Influences of Misalignment Errors of Optical Components in an Orthogonal Two-Axis Lloyd's Mirror Interferometer.

Error Analysis Of Spherical Ultra-Precision Measurement

Stitching interferometry using alternating calibration of positioning and systematic errors

Calibration for the Errors Resulted from Aberration in Long Focal Length Measurement

Misalignment Correction for Free-Form Surface in Non-Null Interferometric Testing

Two-dimensional Stitching Interferometry for Self-Calibration of High-Order Additive Systematic Errors

Interferometric Measurement of Freeform Surfaces Using Irregular Subaperture Stitching

Distortion Correction in Surface Defects Evaluating System of Large Fine Optics

A Novel Method for Analyzing the Influence of Relative Attitude of Laser Profile Scanner on 3D Measurement System

Subaperture moving strategy and related systematic errors in stitching interferometry of X-ray mirrors

Error analysis model-driven workflow for self-calibration stitching testing of X-ray flat surfaces

One-dimensional Stitching Interferometry Assisted by a Triple-Beam Interferometer.

In-situ Sub-Aperture Stitching Measurement Based on Monoscopic Phase Measuring Deflectometry