Non-null Annular Subaperture Stitching Interferometry for Aspheric Testing

Dong Liu,Lei Zhang,Tu Shi,Yongying Yang,Hanshuo Wu,Yibing Shen

DOI: https://doi.org/10.1364/oft.2014.oth3b.4

2014-01-01

Abstract:A novel non-null annular subaperture stitching interferometry based on partial null lens (PNL) and reverse optimization is proposed for aspheric surface testing. Experiment results are given for validation.

What problem does this paper attempt to address?

Aspheric and Free-Form Surfaces Test with Non-Null Sub-Aperture Stitching

Dong Liu,Yuhao Zhou,Jian Bai,Tu Shi,Yibing Shen,Yongying Yang,Lei Zhang

DOI: https://doi.org/10.1117/12.2246149

2016-01-01

Abstract:A free-form surface sub-aperture stitching interferometry (FSSI) is proposed for aspheric and free-form surfaces testing. Different from normal annular and circular sub-aperture stitching method, non-null interferometric configuration and irregular sub-apertures are employed to make the best use of the resolved fringes. Meanwhile, a multi-aperture simultaneous reverse optimizing reconstruction (MSROR) process is proposed for full aperture figure error reconstruction. With the multi-configuration model, full aperture figure error would be extracted in form of Zernike polynomials from sub-apertures wavefront data by the MSROR method. This method concurrently accomplishes sub-aperture retrace error and misalignment correction, requiring neither complex mathematical algorithms, nor sub-aperture overlaps. The experiments show that, the aspheric annular sub-aperture stitching accuracy with the proposed FSSI is more than 1/50 lambda (rms) comparing with the result of ZYGO Verifier Asphere interferometer. The bi-conic surface sector sub-aperture stitching accuracy is about 1/50 lambda (rms) comparing with result of Taylor Hobson contourgraph in longitudinal section contour.
Non-null interferometric aspheric testing with partial null lens and reverse optimization

Dong Liu,Yongying Yang,Yongjie Luo,Chao Tian,Yibing Shen,Yongmo Zhuo

DOI: https://doi.org/10.1117/12.824534

2009-01-01

Abstract:With respect to null test, non-null test is more flexible and can provide fast, general test with acceptable accuracy. A non-null interferometric aspheric testing system, which employs partial null lens and reverse optimization reconstruction, is proposed. The partial null lens compensates most of the longitude aberration of the aspheric under test and keeps the slope of the non-null wavefront within the resolution of the detector. The reverse optimization reconstruction procedure reduces the retrace error of the non-null test and reconstructs the figure of the test aspheric. The characteristic, design process of the partial null lens and especially the implement of the reverse optimization reconstruction are discussed in detail. Computer simulation shows the reverse optimization reconstruction procedure can reconstruct the aspheric figure error with an accuracy better than 1/200wave within 5 mins. The error analysis is also considered and some conclusions are given. This research is of great importance for general aspheric surfacing and testing. © 2009 SPIE.
Aspheric Subaperture Stitching Based on System Modeling.

Lei Zhang,Dong Liu,Tu Shi,Yongying Yang,Shiyao Chong,Baoliang Ge,Yibing Shen,Jian Bai

DOI: https://doi.org/10.1364/oe.23.019176

IF: 3.8

2015-01-01

Optics Express

Abstract:Instead of various mathematical stitching algorithms, an aspheric subaperture stitching interferometric method relying on modern computer modeling technique is presented. Based on our previously reported non-null annular subaperture stitching interferometry (NASSI), a simultaneous reverse optimizing reconstruction (SROR) method based on system modeling is proposed for full aperture figure error reconstruction. All the subaperture measurements are simulated simultaneously with a multi-configuration model in a ray tracing program. With the multi-configuration model, full aperture figure error would be extracted in form of Zernike polynomials from subapertures wavefront data by the SROR method. This method concurrently accomplishes subaperture retrace error and misalignment correction, requiring neither complex mathematical algorithms nor subaperture overlaps. Experiment results showing the validity of SROR method are presented.
Study on testing larger asphericity in non-null interferometer - art. no. 68340T

Yongying Yang,Dong Liu,Yibing Shen,Junmiao Weng,Yongmo Zhuo

DOI: https://doi.org/10.1117/12.760144

2008-01-01

Abstract:Optical systems benefit from the use of aspheric surfaces because aspherics provide additional degrees of freedom for aberration control, yielding higher performance while reducing system weight and complexity. But optical designers always avoid to use aspheres with larger asphericity in optical systems mainly for the reason that the test of the steep aspherics requires extraordinary skill of the experimenter and the technical means to reduce the asphericity of the wavefronts that detected by the digital camera. Even though null optics can be adopted to compensate the asphericity of the test wavefront, they are not suitable for many cases. Each aspheric surface requires a unique null optics, which greatly increases a project's complexity, cost and time delay. In this paper, a type of novel lens with large longitude aberration and simple structure is proposed to reduce the asphericity of the wavefronts. The characteristic and the design process of the simple lens are discussed in detail. A comparison between the simple lens and the aplanat with different focus setting is given. Computer simulation shows the simple lens has much more power in reducing asphericity.
Non-null Testing of the Aspheric Surface Using a Quadriwave Lateral Shearing Interferometer

Rui Zhang,Yanshan Yang,Hongyang Zhao,Zijian Liang,Shengan Liu,Jian Bai

DOI: https://doi.org/10.1364/ao.391263

IF: 1.9

2020-01-01

Applied Optics

Abstract:A non-null aspheric surface testing system using a quadriwave lateral shearing interferometer (QWLSI) based on the randomly encoded hybrid grating is proposed. The system uses a non-null lens to partially compensate for the longitude aberration of the aspheric surface, which is more versatile than the null configuration. QWLSI is a common-path and self-reference system and requires no reference surface. Compared with the conventional Twyman–Green interferometer (TGI), QWLSI has higher dynamic range, better antivibration ability, and higher stability. For a non-null testing system based on the QWLSI and TGI, the compensation ranges of different aspheric surfaces and the allowable range of aspheric axial positions are analyzed under the condition that the interference fringe satisfies the Nyquist sampling theorem. The iterative reverse optimization retrace error-correction algorithm based on the exact system modeling and the localization algorithm of aspheric axial position are discussed. Simulation results show that the root mean square value of the aspheric surface reconstruction residual is less than 1/200λ, which indicates that the system has extremely high theoretical testing accuracy. In the experiment, the QWLSI non-null system and the autocollimation null method with a ZYGO interferometer agree with the testing results of the same aspheric surface, which demonstrates the feasibility and accuracy of the QWLSI aspheric non-null testing method.
Annular Sub-Aperture Stitching Interferometry Testing for Large-Caliber Aspheric

Pengfei Wu,Shuming Yang,Lin Sun,Pu Zhao,Zhuangde Jiang

DOI: https://doi.org/10.1117/12.2241523

2016-01-01

Abstract:An annular sub-aperture stitching interferometry testing is proposed for large-caliber aspheric lens testing, expanding the dynamic range of the interferometer, broadening the scope of the measurement, and reducing the cost of the measurement to a large extent without the use of compensating elements. The large-caliber aspheric is divided into several annular sub-apertures, and there are some overlapping areas between each two adjacent sub-apertures. When testing, the test aspheric is moved along the optical axis according to path planning so that the reference spherical shape and the test aspheric interest at points of common tangency to reduce the fringe density of the sub-aperture. However, in the process of moving the test optic, six DOF (degrees of freedom) misalignment errors will occur. According to the rigid body kinematics theory, the misalignment error separation model is established so that the misalignment factors can be calculated by the information of each overlapping regions. Then all sub-apertures are unified to the same reference with proper algorithm, and subsequently, misalignment error of the reference is removed by Zernike polynomial fitting, and the whole surface error is recovered. Simulation results are shown to demonstrate the feasibility of the method we developed. By analyzing the influence of the six DOF on the stitching result, the most important factor is obtained, and some measures are taken, that is, a measurement system combining two interferometers is designed, one of which is to measure the departures between the reference and the aspheric, and another to test the piston errors to be transmitted to the control system to improve the accuracy.
Reverse Optimization Reconstruction of Aspheric Figure Error in a Non-Null Interferometer

Dong Liu,Tu Shi,Lei Zhang,Yongying Yang,Shiyao Chong,Yibing Shen

DOI: https://doi.org/10.1364/ao.53.005538

IF: 1.9

2014-01-01

Applied Optics

Abstract:Aspheric non-null testing, as an alternative to the traditional null testing, achieves more flexible measurements. However, figure-error reconstruction in non-null tests has always been difficult due to the presence of retrace error. A novel method with reverse optimization is proposed for aspheric figure-error reconstruction in a non-null interferometer. It is a generalized and effective approach based on system modeling and polynomial fitting. An optimization function is set with polynomial coefficients of the desired figure error as variables and those of the detected experimental wavefront as optimization targets. Through the reverse optimization process with iterative ray tracing, the optimal solutions can be extracted and the desired figure error is reconstructed with a simple fitting procedure. Numerical simulations verifying the high accuracy of the proposed method are presented with error considerations. A set of experiments has also been carried out to demonstrate the validity and repeatability of this method.
Elimination of reference surface error on high-accuracy subaperture stitching

Wantao Deng,Kaiwei Wang,Jian Bai,Jinchun Zhang

DOI: https://doi.org/10.3969/j.issn.1007-2276.2014.04.031

2014-01-01

Infrared and Laser Engineering

Abstract:Sub-aperture stitching can be used to measure large optical aperture with a relatively smaller aperture interferometer. In the process of sub-aperture testing, if reference surface error is taken into consideration, the stitching result will deviate from truth. As a result, obtaining and compensating reference surface error is necessary. An approach was proposed to obtain and compensate reference surface error by fitting overlap data of each sub-aperture with Zernike terms. A series of Zernike terms were added into traditional stitching function, the form of reference surface that characterized by a Zernike polynomial was obtained by using the least-square method. Experiments had been done on flat and sphere sub-aperture stitching, which were then compared with QED′s result. The deviation of PV and RMS of these two results are less than 5 nm and 0.2 nm respectively. At the same time, the mismatch of stitching aperture is less than 10 nm. Experimental result proves that reference surface error can be compensated in the process of sub-aperture stitching and stitching aperture is more accurate.
Interferometric Measurement of Freeform Surfaces Using Irregular Subaperture Stitching

Zhongming Zang,Jian Bai,Dong Liu,Yuling Liu,Yuhao Zhou,Tu Shi,Lei Zhang,Liang Miao,Wei Huang

DOI: https://doi.org/10.1088/1361-6501/ab3be3

IF: 2.398

2020-01-01

Measurement Science and Technology

Abstract:Irregular subaperture stitching interferometry (ISSI) is proposed for non-null optical freeform surface testing. Compared with circular and annular subapertures, irregular subapertures have a better performance in matching the locally resolvable interferograms due to the rotational asymmetry of freeform surfaces. A modified multi-aperture simultaneous reverse optimization reconstruction algorithm is employed for the subaperture stitching, allowing not only non-complementary subapertures but also no subaperture overlaps. Numerical simulations with error analyses display the accuracy of our method. Experiments showing the effectiveness of the ISSI are presented by testing a phi 20 mm biconic surface with cross-validation.
Subaperture Stitching Test of Convex Aspheres by Using the Reconfigurable Optical Null

Shanyong Chen,Shuai Xue,Yifan Dai,Shengyi Li

DOI: https://doi.org/10.1016/j.optlastec.2016.12.026

IF: 4.939

2017-01-01

Optics & Laser Technology

Abstract:Subaperture stitching test in combination of the reconfigurable optical null we proposed recently provides flexible solutions to various surfaces including convex aspheres and even aspheres of large aperture. However it is challenging for the stitching optimization to get the real surface error because the surface error is strongly coupled with misalignment-induced aberrations in near-null subaperture measurements. Aiming at this challenge, we first figure out the property of aberrations induced by misalignment of optical null or test surface. It shows that identical misalignment of the optical null introduces nearly identical aberrations to subapertures with different off-axis distances, while misalignment of the test surface introduces little aberrations to the central subaperture. The stitching algorithm is then proposed with focus on decoupling surface error and induced aberrations. The major step is to calibrate out the effect of misaligned near-null optics before stitching optimization by using the central subaperture measurement. We also present the through-the back null test for the purpose of cross test. The axial distance is precisely monitored by a low coherence interferometer, which enables accurate determination of the spherical aberration component of surface error. Final experimental results show consistent spherical aberration obtained by stitching test and by the through the-back null test. It is a big step towards instrumentation of subaperture stitching test for aspheres with rather big amount of misalignments in surface metrology practice.
Research of precision interference locating method for a partial null compensator at aspheric testing

Yongying Yang,Dong Liu,Gao Xin,Chao Tian,Yongjie Luo,Yibing Shen,Yongmo Zhuo

DOI: https://doi.org/10.1117/12.825830

2009-01-01

Abstract:Based on the difference between theoretical with real interferogram images the figure of original aspheric surface can be obtained using an algorithm of Reverse iterate Optimization Reconstruction (ROR) calculating technique. Because the procedure of ray tracing path needed an accurate geometry of optical structure size so the aspheric and compensator L C must be located in the optical path. To avoid the compensator L C resulted in bigger spherical aberration a smart located method is proposed in this paper. Before measurement an aplanatic lens consists of compensator L C and another removable lens L M that the last surface is a standard one. So Fiezau interference is formed by the standard one with reflected ray from the vertex of aspheric that the aspheric surface detected can be accurately located. At testing the lenses L M will be removed and the aspheric is moved to an adapted position. The experiments show the displacement locating accuracy is an amount of micron. The RMS for aspheric testing of ROR calculating technique is better than 1/200 wavelength. © 2009 SPIE.
An efficient iterative algorithm for subaperture stitching interferometry for aspheric surface

Shanyong Chen,Shengyi Li,Yifan Dai

DOI: https://doi.org/10.1117/12.666859

2006-01-01

Abstract:The subaperture stitching testing method provides a cost-effective means for large field of view, high spatial resolution interferometer. Current approaches to subaperture stitching are mostly limited to piano optics, where only the piston and the tilts are considered. Another implied assumption is that pixels corresponding to the overlapping region between pairs of subapertures are exactly known and given by the nominal translation within a spatial tolerance. This is obviously impractical in the case of aspheric surface. We address the problem here and introduce a geometrical approach to formulate it mathematically. It is essentially a large-scale nonlinear optimization problem, which is very complicated and time-consuming to be solved by conventional method. By virtue of the alternating optimization technique and the successive linearization method, we present a novel iterative algorithm for subaperture stitching interferometry for aspheric surface. It differs from others in that the CAD model of the tested surface is used to determine the overlapping region precisely and efficiently. Subapertures are then simultaneously stitched by minimizing deviations among them, as well as deviations from the nominal surface. As a result, precise prior knowledge of the nulling and alignment motion, which is of six degrees of freedom, is no longer required. Numerical simulations are given to test the validity and computational efficiency of the proposed algorithm.
Non-null Testing for Aspheric Surfaces Using Elliptical Sub-Aperture Stitching Technique.

Zixin Zhao,Hong Zhao,Feifei Gu,Hubing Du,Kaixing Li

DOI: https://doi.org/10.1364/oe.22.005512

IF: 3.8

2014-01-01

Optics Express

Abstract:We propose an elliptical sub-aperture stitching (ESAS) method to measure the aspheric surfaces. In our method, the non-null configuration is used to overcome the disadvantages of the null testing. By adding the dynamic tilt, the different local nearly null fringe patterns are obtained and the corresponding phase data in the elliptical masks is extracted with negligible retrace errors. In order to obtain the full aperture result, a stitching algorithm is developed to stitch all the phase data together. We firstly show the principle of our method. Then the performance of the proposed method is analyzed by simulation experiments. In the end, practical examples are given to demonstrate the correctness of the proposed method. The stitching result shows a good agreement with the full-aperture null testing result.
Study of annular sub-aperture stitching interferometry for aspheric surfaces

Zixin Zhao,Zhaoxian Xiao,Hangying Zhang

DOI: https://doi.org/10.1117/12.2277004

2017-01-01

Abstract:Annular sub-aperture stitching interferometry (ASSI) has provided an alternative solution to measure rotationally symmetric aspheric surfaces with low cost and high flexibility. It is an effective way to test the aspheric surface with a larger aperture and larger relative aperture without null compensation. In this paper, two kinds of annular sub-aperture stitching algorithms, pairwise sequential stitching (PSS) and global synchronously stitching (GSS), were studied. The detailed mathematical expressions are shown in the form of matrix. Besides, the influence of the noise and number of sub-apertures to the two algorithms was also studied by simulation. At last, experimental results of a convex hyperboloid surface by using the two stitching algorithms are presented.
Measurement of Aspheric Surfaces Using Annular Subaperture Stitching Interferometry Based on an Automatic Positioning Method: Theory and Application

Yongfu Wen,Haobo Cheng

DOI: https://doi.org/10.1117/1.oe.53.7.074104

IF: 1.3

2014-01-01

Optical Engineering

Abstract:A simple and effective automatic positioning method (APM) is proposed for the application of annular subaperture stitching interferometry in the stage of precision polishing. In the testing process, a series of optical path difference (OPD) data of subaperture are obtained since the interferometer is shifted relative to the tested aspheric surface. These OPD data are analyzed by the APM to get the key stitching parameters (e.g., aspheric departure) without a precision motion system. The basic principles of the APM are described. The performance of the method is simulated in some pertinent cases. Finally, we study the applicability of the proposed method to subaperture stitching tests of a hyperbolic mirror. The stitching results agree with the full-aperture test results. It demonstrates the validity and practicability of the proposed algorithm. (c) 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
Measurement of Aspheric Surfaces Using an Improved Annular Subaperture Stitching Interferometry (Iassi)

Yongfu Wen,Haobo Cheng

DOI: https://doi.org/10.1088/0957-0233/25/7/075007

2014-01-01

Abstract:An improved annular subaperture stitching interferometry (IASSI) is proposed for testing aspheric surfaces in the stage of precision polishing. It includes a reasonable stitching model and an automatic positioning operation. In the testing process, a series of optical path difference (OPD) data of annular subapertures is obtained as the interferometer is gradually shifted relative to the tested aspheric surface. Then these OPD data can be analyzed by the automatic positioning operation to get the key stitching parameters, and can be stitched together based on a reasonable mathematical model. To verify its validity, we study the applicability of the method to subaperture stitching tests of two conic aspheric surfaces. The stitching results agreed with the full-aperture test results.
Measurement of Aspheric Surface Combining Point Diffraction Interferometry and Annular Subaperture Stitching

Fen Gao,Zhuangde Jiang,Zixin Zhao,Bing Li

DOI: https://doi.org/10.1117/1.oe.54.1.014102

IF: 1.3

2015-01-01

Optical Engineering

Abstract:Point diffraction interferometry (PDI) combined with annular subaperture stitching is proposed for ultrahigh-accuracy measurements of aspheric surfaces. By adding an axial movement to the test optics in the PDI system, aspheric surfaces with large departures can be measured with high accuracy by stitching the annular measurement data of different axial positions. We examine the principle of PDI-based annular subaperture stitching and the stitching algorithm. Simulations and experiments demonstrate the feasibility and effectiveness of our proposed method. Our method retains the ultra-high accuracy of PDI while extending the vertical dynamic range of the interferometer, enabling nanometer or even subnanometer accuracy measurements of large-departure rotationally symmetric aspheric surfaces. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
Non-null Testing for Standard Quadric Surfaces with Subaperture Stitching Technique

Lisong Yan,Xiaokun Wang,Ligong Zheng,Fan Di,Feng Zhang,Donglin Xue,Haixiang Hu,Xuefeng Zeng,Xuejun Zhang

DOI: https://doi.org/10.1016/j.optcom.2014.11.075

IF: 2.4

2015-01-01

Optics Communications

Abstract:A new method is proposed for testing standard quadric surfaces with several subapertures based on interferometry. Subapertures arrangement, best-fit sphere calculation and distortion correction about such surfaces are discussed in this paper. In addition, we provide an experimental demonstration by testing a empty set310 mm convex hyperboloid mirror. The experimental result shows that the proposed method can accomplish the testing of quadric mirrors without auxiliary compensation effectively. The analysis and proposed methods bring much to the application of non-null aspheric testing. (C) 2014 Elsevier B.V. All rights reserved.
Near-null Interferometry Using an Aspheric Null Lens Generating a Broad Range of Variable Spherical Aberration for Flexible Test of Aspheres.

Shuai Xue,Shanyong Chen,Guipeng Tie

DOI: https://doi.org/10.1364/oe.26.031172

IF: 3.8

2018-01-01

Optics Express

Abstract:A null lens moving back and forth relative to a point source can generate variable spherical aberration for flexible test of aspheres. Different from the previous methods, variable spherical aberration null theory was developed by us to optimize the null lens. The optimized null was a plano-convex singlet containing a high order even asphere. Its attractive advantages are the simple structure and the broad range of testable surfaces. Most concave prolate conic and near conic surfaces with k∙R value varying between 0 and about 70000mm and with smaller relative aperture than that determined by each k∙R value can be tested. The testable asphericity range is between 0 and about 230λ. Relations among these testable surfaces were revealed as different groups of equidistant surfaces. To explicitly show the ability of the null, the measurable surfaces range map that contains all parameters defining a conic surface was offered. A practical near-null test system using this null was established. Alignment, near-null data processing, and error sources are analyzed in detail. To verify the broad testable surfaces range, three surfaces with widely varying amounts of asphericity were tested. Cross tests were provided to verify the test system accuracy.
Optimization Stitching Model for Subaperture Test of Aspheric Surfaces

Yongfu Wen,Haobo Cheng

DOI: https://doi.org/10.1117/1.oe.53.4.044105

IF: 1.3

2014-01-01

Optical Engineering

Abstract:Annular subaperture stitching interferometry (ASSI) is increasingly used for precision metrology of aspheric surfaces. The stitching model is a critical factor for stitching algorithms in ASSI. An optimized stitching model is proposed, which describes the alignment errors of adjacent subapertures based on an off-axis model and wave aberration theory. To keep the stitching errors from transmitting and accumulating, a simultaneous optimization algorithm is presented. The residual difference of overlapped regions of adjacent subapertures is utilized to evaluate the stitching accuracy. Finally, the comparative numerical simulations and experiments are carried out. It shows that the optimized stitching model has a better performance and validity. (C) 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)

Non-null Annular Subaperture Stitching Interferometry for Aspheric Testing

Aspheric and Free-Form Surfaces Test with Non-Null Sub-Aperture Stitching

Non-null interferometric aspheric testing with partial null lens and reverse optimization

Aspheric Subaperture Stitching Based on System Modeling.

Study on testing larger asphericity in non-null interferometer - art. no. 68340T

Non-null Testing of the Aspheric Surface Using a Quadriwave Lateral Shearing Interferometer

Annular Sub-Aperture Stitching Interferometry Testing for Large-Caliber Aspheric

Reverse Optimization Reconstruction of Aspheric Figure Error in a Non-Null Interferometer

Elimination of reference surface error on high-accuracy subaperture stitching

Interferometric Measurement of Freeform Surfaces Using Irregular Subaperture Stitching

Subaperture Stitching Test of Convex Aspheres by Using the Reconfigurable Optical Null

Research of precision interference locating method for a partial null compensator at aspheric testing

An efficient iterative algorithm for subaperture stitching interferometry for aspheric surface

Non-null Testing for Aspheric Surfaces Using Elliptical Sub-Aperture Stitching Technique.

Study of annular sub-aperture stitching interferometry for aspheric surfaces

Measurement of Aspheric Surfaces Using Annular Subaperture Stitching Interferometry Based on an Automatic Positioning Method: Theory and Application

Measurement of Aspheric Surfaces Using an Improved Annular Subaperture Stitching Interferometry (Iassi)

Measurement of Aspheric Surface Combining Point Diffraction Interferometry and Annular Subaperture Stitching

Non-null Testing for Standard Quadric Surfaces with Subaperture Stitching Technique

Near-null Interferometry Using an Aspheric Null Lens Generating a Broad Range of Variable Spherical Aberration for Flexible Test of Aspheres.

Optimization Stitching Model for Subaperture Test of Aspheric Surfaces