Research of precision interference locating method for a partial null compensator at aspheric testing

Yongying Yang,Dong Liu,Gao Xin,Chao Tian,Yongjie Luo,Yibing Shen,Yongmo Zhuo
DOI: https://doi.org/10.1117/12.825830
2009-01-01
Abstract:Based on the difference between theoretical with real interferogram images the figure of original aspheric surface can be obtained using an algorithm of Reverse iterate Optimization Reconstruction (ROR) calculating technique. Because the procedure of ray tracing path needed an accurate geometry of optical structure size so the aspheric and compensator L C must be located in the optical path. To avoid the compensator L C resulted in bigger spherical aberration a smart located method is proposed in this paper. Before measurement an aplanatic lens consists of compensator L C and another removable lens L M that the last surface is a standard one. So Fiezau interference is formed by the standard one with reflected ray from the vertex of aspheric that the aspheric surface detected can be accurately located. At testing the lenses L M will be removed and the aspheric is moved to an adapted position. The experiments show the displacement locating accuracy is an amount of micron. The RMS for aspheric testing of ROR calculating technique is better than 1/200 wavelength. © 2009 SPIE.
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