Abstract:The National Metrology Institute of Japan (NMIJ) has developed a high-precision sphericity calibration system utilizing a Fizeau interferometer and conducted a thorough evaluation of the system's measurement uncertainty. Generally, there are two principal sources of uncertainty in the measurement outcomes when utilizing a spherical Fizeau interferometer. First, the accuracy of the system is significantly influenced by the prior knowledge of the reference sphere surface's absolute profile. To address this, the study established a straightforward yet effective calibration system for the reference sphere surface using a random ball test method. Second, the system's precision is affected by misalignment aberration, which occurs when there is any lateral or longitudinal displacement of the test sphere from the confocal position relative to the reference sphere. This misalignment can introduce both high-order shape errors (misalignment aberrations) and low-order shape errors (alignment errors). Through analytical consideration of an observation coordinate system on the camera plane, this study delves into misalignment aberrations, suggesting that the impact of misalignment should be determined experimentally for each reference sphere unit due to potential imperfections that may be revealed by misalignment. Furthermore, the study proposes that uncertainties related to misalignment aberrations are theoretically confirmed to be smaller than previous studies by conducting an in-depth uncertainty analysis of the misalignment, with a focus on the observation coordinate system on the camera plane. Notably, the research demonstrates that a measurement uncertainty level of λ/100 is achievable, maintaining a broader tolerance for misalignment than previously reported studies. The uncertainty of calibration of the reference sphere unit's absolute profile was 4.2 nm and the uncertainty of sample measurement was determined to be 4.6 nm with misalignment tolerance of ±λ/10 . This advancement marks a stride toward improving the accuracy and reliability of sphericity measurements, offering potential for widespread application in precision engineering and metrology.

Error Analysis Of Spherical Ultra-Precision Measurement

Error impact analysis and experimental research for absolute testing of spherical surfaces

Aberration Calibration in High-Na Spherical Surfaces Measurement on Point Diffraction Interferometry

Error Analysis of Spherical Scanning Mechanism Used for Surface Defects Detection

Method of Two-position Spherical Testing

Absolute Ultra-Precision Measurement of High-Numerical-aperture Spherical Surface by High-Order Shift-Rotation Method Using Zernike Polynomials

Realization Of Spherical Absolute Testing

Simulation and Error Analysis of Non-Null Interferometry for Measuring High-Order Aspheric Surface Parameter Errors

Error Analysis of Aspheric Surface with Reference Datum

Sub-Nanometer Misalignment Aberrations Calibration of the Fizeau Interferometer for High-Numerical-Aperture Spherical Surface Ultra-Precision Measurement

Geometric Analysis of Measurement Errors in a Surface Metrology Class with Closed-Loop Probes

Air Flow Turbulence Orthogonality and Surface Error Estimation in Large Aperture Optical Testing

Absolute Spherical Surface Metrology by Differencing Rotation Maps.

Improving the Accuracy of Interferometer Testing with Absolute Surface Calibration and Power Spectral Density Analysis

An Error Separation Method Based on Surface Matching in Large Aspheric Measurement

Error Analysis of Optical System for Full-View and High-Precision Three-Dimensional Measuring Instrument

Calibration of Polarization and Adjustment Error of High-Na Spherical Surface Testing in Point Diffraction Interferometry

Novel analysis of alignment error on spherical Fizeau interferometer and uncertainty evaluation of sphericity calibration system based on random ball test

Generalized Shift-Rotation Absolute Measurement Method for High-Numerical-Aperture Spherical Surfaces with Global Optimized Wavefront Reconstruction Algorithm

Error Separation and Correction Technology of Precision Measuring System in Aspheric Fine Grinding Phase

Absolute Surface Metrology by Shear Rotation with Position Error Correction