Abstract:A general method is presented for spherical surface testing with unknown phase shifts based on a physical model of the interferometer cavity, which describes the phase shifts taking into account the rigid cavity motions and the radial imaging distortion of the interferometer. The captured interferograms are processed frame by frame with the regularized frequency-stabilizing method, so as to get the phase shifts between the frames. These phase shift data are subsequently fitted, and the initial estimations for the wavefront, direct current and interference contrast terms are calculated by the least-squares method. Specially, a simple way is proposed to find reasonable initial guess for numerical aperture (NA) of the test beam (when NA is unknown), so as to ensure the effectiveness of the above phase shift fitting procedure. Then, the wavefront result is further refined in an iterative way, by fitting the sequence of interferograms to the physical model of the interferometer cavity with the linear regression technique. Finally, the wavefront result related to the actual surface profile is retrieved after removing the aberrations due to the surface misalignment and the imaging distortion. Both simulations and experiments with the ZYGO interferometer have been carried out to validate the proposed method, with experimental accuracies better than 0.004λ RMS achieved. The proposed method provides a feasible way to spherical surface testing without the use of any phase-shifting devices, while retaining good accuracy and robust convergence performance.

Error impact analysis and experimental research for absolute testing of spherical surfaces

Error Analysis Of Spherical Ultra-Precision Measurement

Method of Two-position Spherical Testing

Aberration Calibration in High-Na Spherical Surfaces Measurement on Point Diffraction Interferometry

Measurement of Aspheric Surface

Error Analysis of Spherical Scanning Mechanism Used for Surface Defects Detection

Assembly Accuracy Analysis for Small Components with A Planar Surface in Large-Scale Metrology

Misalignment Correction for Free-Form Surface in Non-Null Interferometric Testing

The Wavefront Aberration Analysis and Testing Accuracy Evaluation for the Large Aberration Aspheric System Based on the Best Fit Sphere

Elimination of reference surface error on high-accuracy subaperture stitching

Retrace Error Correction for Non-Null Testing of Optical Aspheric Surface

Research on Auto-Centering Device in Surface Defects Evaluation System of Large Spherical Optics

The wavefront aberration analysis and testing accuracy evaluation for the large aberration aspheric system based on the best fit sphere - art. no. 68342V

Defects Evaluation System for Spherical Optical Surfaces Based on Microscopic Scattering Dark-Field Imaging Method

Novel Algorithm for Compensating Misalignment in Optical Spherical Surface Testing

Improving the Accuracy of Interferometer Testing with Absolute Surface Calibration and Power Spectral Density Analysis

Air Flow Turbulence Orthogonality and Surface Error Estimation in Large Aperture Optical Testing

Geometric Analysis of Measurement Errors in a Surface Metrology Class with Closed-Loop Probes

Practical Retrace Error Correction in Non-Null Aspheric Testing: A Comparison

Error Analysis of a Spherical Capacitive Sensor for the Micro-Clearance Detection in Spherical Joints

Interferometric Spherical Surface Testing with Unknown Phase Shifts