Abstract:The optical interference absolute test technology can separate the surface figures of the reference plane as well as the tested optics, and it is an effective means to calibrate the accuracy of the interferometer.For the calibration requirements of large-aperture plane interferometer, the rotation translation method only requires one transmission flat and one reflective flat, which avoids the cost and difficulty of processing an additional flat. However, with the increase of the caliber, the weight and support make the deformation of the reflective flat larger in various states of translation and rotation, and then affect the absolute test accuracy.Therefore, it was proposed to design a lightweight calibration mirror as a reflective flat, and used the rotation translation method to realize the absolute test of the large-aperture interferometer. The Φ 1 500 mm plane interferometer was used as the test requirement, the SiC was used as the calibration mirror material, and the lightweight design was carried out with a triangular lightweight structure and a six-point back support method.The weight was controlled to only 93 kg, and the surface deformation PV value introduced by the support and gravity was 9.75 nm. It superimposed this deformed surface shape to PV value of λ/4, and performed rotation translation absolute test simulation calculation for processing surface shapes of different distributions. For the surface shapes with low degree of rotational symmetry and containing more high-frequency components, the test accuracy is λ/30, and for the smooth and symmetrical surface shapes, the test accuracy can reach to λ/50.Therefore, in order to achieve the λ/50 accuracy calibration target for the large-aperture plane interferometer, it requires that the PV value of the processed surface of the SiC calibration mirror is lower than λ/4, try to avoid high-frequency components, and have a high degree of rotational symmetry.

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Error impact analysis and experimental research for absolute testing of spherical surfaces

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Error Analysis Of Spherical Ultra-Precision Measurement

Comprehensive Design and Calibration of an Even Aspheric Quarter-Wave Plate for Polarization Point Diffraction Interferometry.

Absolute Test Technology for Rotation and Translation Interference Based on Lightweight Calibration Mirror

Simulation and Experimental Study of Absolute Measurement Method for Optical Surface

Absolute Surface Metrology by Shear Rotation with Position Error Correction

Calibration of Polarization and Adjustment Error of High-Na Spherical Surface Testing in Point Diffraction Interferometry

Sub-Nanometer Misalignment Aberrations Calibration of the Fizeau Interferometer for High-Numerical-Aperture Spherical Surface Ultra-Precision Measurement

Practical and Accurate Method for Aspheric Misalignment Aberrations Calibration in Non-Null Interferometric Testing

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The shift–rotation absolute testing method based on autocollimation

Absolute Surface Form Measurement of Flat Optics Based on Oblique Incidence Method

Absolute Spherical Surface Metrology by Differencing Rotation Maps.

Absolute Ultra-Precision Measurement of High-Numerical-aperture Spherical Surface by High-Order Shift-Rotation Method Using Zernike Polynomials

Method for Absolute Measurement of Flat Surface

High Accuracy Measurement of Power Spectral Density in Middle Spatial Frequency Range of Optical Surfaces Using Optical Profiler

Rotationally Asymmetric Figure Measurement of Optical Flat Using Rotational Shear Phase Measuring Deflectometry

Further Improvements of Digital Interferometer

Research on System Error Calibration Algorithm of Point Diffraction Interferometer