Absolute Distance Measurement with Spectral Domain White-Light Interferometer

薛晖,倪肖勇,沈伟东,章岳光,刘旭,顾培夫
DOI: https://doi.org/10.3785/j.issn.1008-973x.2010.02.033
2010-01-01
Abstract:A fiber-optic spectrometer was employed for recording spectral interferograms over a wide wave-length range(450~900 nm).A new method was presented for retrieving the wrapped phase function by the envelope method.The unwrapped phase was obtained by a simple procedure based on linear depend-ence of optical path difference between interferometer beams on the refractive index of optical elements.The effective thickness of the beam splitter was given by the slope of the linear dependence,and the abso-lute distance was determined by the intercept.The method was applied to measure the distances when dis-placing mirror to different positions.The measured results deviated less than 1% from those of vernier cal-iper and presented a linearity of 99.9%.The thickness of a BK7 glass plate was also measured.An accura-cy of 0.21% was obtained compared with other methods.The reasons that affected the measurement accu-racy were analyzed,and the range of measurable distance was discussed.
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