Abstract:Aspherical optics have superior performance in many applications. However, precision metrology for an aspherical surface is a key stage in its manufacture. Subaperture stitching interferometry (SSI) is one of the mainstream testing methods for aspherical metrology. In many cases, Annular Stitching Subaperture Interferometry (ASSI) is more suitable for components having rotational symmetry because, compared to SSI, the number of motion directions that need to be adjusted is less. Although motion only along the optical axis is of concern in ASSI, inaccurate localization for subapertures may also occur due to the machining error at the optical center of the optics under test and errors in Cat's eye location, thereby leading to measurement errors. To overcome these problems, an accurate localization method for subaperture stitching is proposed. It is based on the maximum asphericity information between the reference spherical wavefront and the test aspherical surface. First, by using the test aspherical formula and theoretical spherical wavefront, we can calculate the minimum peak-to-valley (PV) value of maximum asphericity. The theoretical location of an optimal reference sphere, which corresponds to this value, can be obtained. Then, we perform a practical test, which starts at the initial zero position, and find an actual minimum PV value near its theoretical location. The difference between the theoretical location and the actual one is the compensation quantity. Finally, we execute ASSI measurement to aspherical optics. The location coordinate of each subaperture is compensated with the acquired quantity. Through the experiments, it can be concluded that the proposed method can improve the measurement accuracy of ASSI in terms of error elimination. The results produced by the new method are more desirable than those of the conventional one.

Repeatability Analysis of One-Dimensional Angular-Measurement-based Stitching Interferometry.

High-Accuracy Method for Measuring Two-Dimensional Angles of A Linear Guideway

A Novel Method To Enhance The Sensitivity For Two-Degrees-Of-Freedom Straightness Measurement

A High-Precision Five-Degree-Of-Freedom Measurement System Based on Laser Collimator and Interferometry Techniques

Small Angular Displacement Measurement Based on an Autocollimator and a Common-Path Compensation Principle.

Study of the Method for Measuring Four-Degree-of-Freedom Geometric Errors of a Linear Stage

A Novel Method to Simultaneously Measure the Straightness

Aspheric and Free-Form Surfaces Test with Non-Null Sub-Aperture Stitching

Influence of Alignment Error and Random Noise on Interferometry Flat Sub-Aperture Stitching

Aspheric Subaperture Stitching Based on System Modeling.

Investigation of Heterodyne Interferometer Technique for Dynamic Angle Measurement: Error Analysis and Performance Evaluation

Two-dimensional Stitching Interferometry for Self-Calibration of High-Order Additive Systematic Errors

Stitching Interferometry for Synchrotron Mirror Metrology at National Synchrotron Light Source II (NSLS-II)

One-dimensional Stitching Interferometry Assisted by a Triple-Beam Interferometer.

Two-dimensional Stitching Interferometry Based on Tilt Measurement.

Interferometric Measurement of Freeform Surfaces Using Irregular Subaperture Stitching

Model analysis of sub-aperture stitching interferometry for aspheric surface test

Measurement of Aspheric Mirrors Using Arc-Region Scanning and Data Stitching Technology

Accurate Localization Method for Subaperture Stitching Interferometry in Aspherical Optics Metrology.

Measurement of Straightness Without Abbe Error Using an Enhanced Differential Plane Mirror Interferometer

Annular Sub-Aperture Stitching Interferometry Testing for Large-Caliber Aspheric