Short Circuit Capability and Short Circuit Induced <inline-formula> <tex-math notation="LaTeX">$V_{\mathrm{TH}}$ </tex-math></inline-formula> Instability of a 1.2-kV SiC Power MOSFET

Jiahui Sun,Jin Wei,Zheyang Zheng,Yuru Wang,Kevin J. Chen
DOI: https://doi.org/10.1109/JESTPE.2019.2912623
IF: 5.462
2019-01-01
IEEE Journal of Emerging and Selected Topics in Power Electronics
Abstract:The withstand capability and threshold voltage ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$V_{\mathrm {TH}}$ </tex-math></inline-formula> ) instability of 1.2-kV silicon carbide (SiC) MOSFETs under repetitive short circuit (SC) tests are investigated. An SC test system is constructed to apply repetitive SC stress to SiC MOSFETs and measure the transfer <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$I$ </tex-math></inline-formula> – <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$V$ </tex-math></inline-formula> characteristics and gate-to-source leakage current ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$I_{\mathrm {GSS}}$ </tex-math></inline-formula> ) after each set of SC tests. To evaluate the SC capability, repetitive SC tests with different SC durations ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$t_{p}$ </tex-math></inline-formula> ) are conducted until device failure. The SC withstand time (SCWT) at 1000 SC cycles is found to be <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\sim 3.3~\mu \text{s}$ </tex-math></inline-formula> . <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$V_{\mathrm {TH}}$ </tex-math></inline-formula> instability under repetitive SC tests prior to the device failure is characterized. A bidirectional <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$V_{\mathrm {TH}}$ </tex-math></inline-formula> shift behavior, i.e., negative shift at shorter <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$t_{p}$ </tex-math></inline-formula> and positive shift at longer <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$t_{p}$ </tex-math></inline-formula> , was revealed. The <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$V_{\mathrm {TH}}$ </tex-math></inline-formula> shifts under repetitive SC tests are attributed to the SC pulse process according to the results of high-temperature reverse bias (HTRB) and dynamic high-temperature gate bias (HTGB) tests. The underlying mechanisms of the complex <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$V_{\mathrm {TH}}$ </tex-math></inline-formula> shift behavior are explained in a unified framework by taking into account the junction temperature ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$T_{j}$ </tex-math></inline-formula> ) increase with longer <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$t_{p}$ </tex-math></inline-formula> . TCAD device simulation is used to help analyze the mechanisms.
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