Flexible Lead-Free BaTiO3 Ferroelectric Elements with High Performance

Jingying Wu,Zhongshuai Liang,Chunrui Ma,Guangliang Hu,Lvkang Shen,Zixiong Sun,Yong Zhang,Lu,Ming Liu,Chun-Lin Jia

DOI: https://doi.org/10.1109/led.2019.2911956

IF: 4.8157

2019-01-01

IEEE Electron Device Letters

Abstract:High-quality epitaxial (111) BaTiO3 thin film was successfully fabricated on flexible fluorophlogopite mica substrate by radio frequency magnetron sputtering. The flexible BaTiO3 thin-film element shows observably stable ferroelectric properties with the bending radius of 4 mm and well-mechanical fatigue resisting performance with 104 bending cycles at the bending radius of 6mm. Furthermore, it exhibits excellent ferroelectric fatigue resistance after suffering 106 bipolar switching cycles. Most importantly, the element shows good thermal stability in temperature range from 25°C to 100°C. All these stable ferroelectric properties indicate their enormous potential in flexible non-volatile memory devices under harsh working environment.