Abstract:Fast tool servo diamond turning is conventionally a spiral path-based process widely used to efficiently fabricate non-rotationally symmetric surfaces with ultra-fine accuracy. However, the technique is naturally restricted by the demanding bandwidth and resolution requirements, which are directly related to the complexity and size of the machining surface. Moreover, non-smooth trajectories required for machining complex lens array with discontinuities, due to overlapping sharp edges, induce vibrations causing the surface quality to deteriorate, and adding additional barriers to using this conventional technique in broader applications. In this paper, a new diamond machining approach is proposed to address its inherent drawbacks. Using the new method, complex lens array consisting of arbitrary lenslet shapes could be fabricated in an extendable way without the typical limitations. Theoretical investigations of the unique cutting kinematics, motion determination, servo synchronization and compensation will be carried out. To predict the machined surface topography, the surface generation mechanism with consideration of both the kinematic tool/workpiece interaction and elastic recovery of materials is presented. The experimental fabrication of hexagonal micro-sphere lens array, micro-freeform lens array, as well as seamlessly stitched sinusoidal surface with quadrupled areas was highly consistent and aligned with the theoretical predictions, thus demonstrating the effectiveness of the new approach and its potential for broader applications.

Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO 2 Balls Mask.

Fabrication of micro lens array on diamond surface

Fabrication of Submicrometer Inp Pillars by Colloidal Lithography and Dry Etching

Microfabrication Assisted by Laser-Trapped Microparticle Tools

Fabrication of concave microlenses on a diamond by a spin coating process.

Fabrication of monolithic diamond photodetector with microlenses.

A New Diamond Machining Approach for Extendable Fabrication of Micro-Freeform Lens Array

Fabrication of Diamond Microlenses by Chemical Reflow Method.

Fabrication of a microlens array on diamond for Shack-Hartmann sensor

Fabrication of Diamond Microstructures by Using Dry and Wet Etching Methods

Fabrication of Diamond Nanoneedle Arrays Containing High‐Brightness Silicon‐Vacancy Centers

Diffraction Grating Microfabrication by ICP Technique with Two-Layer Lift-off Processing in Single Crystal Diamond

Large-scale Fabrication of High-Density Silicon-vacancy Centers via Helium-ion Implantation of Diamond Nucleation Surface

On-chip Diamond Integrated Photonic Devices

Subtractive 3D printing of optically active diamond structures

Fabrication of thin diamond membranes for photonic applications

Sub-Diffraction Limited Nanogroove Fabrication of 30 Nm Features on Diamond Films Using 800 Nm Femtosecond Laser Irradiation

High-quality Diamond Microparticles Containing SiV Centers Grown by Chemical Vapor Deposition with Preselected Seeds

Fabrication of a diamond concave microlens array for laser beam homogenization

Fabrication of Diamond Microlens Arrays for Monolithic Imaging Homogenizer

Fabrication of biomimetic compound eye on single crystal diamond