Investigation of Degradation under Arbitrary Bias Conditions in HfO2 Based Nanosheet Nfets by 3D Kinetic Monte-Carlo Method

Wangyong Chen,Linlin Cai,Yun Li,Kunliang Wang,Xing Zhang,Xiaoyan Liu,Gang Du
DOI: https://doi.org/10.7567/1347-4065/ab073c
IF: 1.5
2019-01-01
Japanese Journal of Applied Physics
Abstract:A 3D kinetic Monte-Carlo simulator is developed to evaluate the degradation and time-dependent variability of the device subjected to arbitrary bias conditions, which is validated by experimental results. The multi-trap including interface states and bulk traps induced reliability degradation is investigated based on trap behaviors simulation in a unified framework. Utilizing the proposed method, threshold voltage shift (ΔVth) and the variability in the nanosheet nFETs with HfO2 gate dielectric under over the full bias space are simulated. The time evolution of the stress-induced interface/bulk trap number, as well as the respective contribution to the degradation, can be distinguished under different Vg/Vd bias combinations. Simulation results show that hot carrier injection induces more serious ΔVth and suffers more variation due to the dominant contribution of interface states. Moreover, the ΔVth induced by bias temperature instability is more prominent than that under off-state stress at 398 K.
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