Optical Fiber MEMS Micro Pressure Sensor Based on Beam-membrane Structure

Bian Tian,Feng Zhan,Feng Han,Kaikai Li,Na Zhao,Ning Yang,Zhuangde Jiang

DOI: https://doi.org/10.1109/nems.2019.8915668

IF: 2.398

2018-01-01

Measurement Science and Technology

Abstract:In this paper, an optical fiber MEMS (Micro-Electro-Mechanical System) micro pressure sensor based on BM (beam-membrane) structure is proposed. The most important part of the sensor is composed of a sensitive silicon diaphragm and a dual fiber collimator. In the designed optic fiber micro pressure sensor, the sensitive silicon diaphragm creatively utilizes a BM structure made by MEMS manufacturing technology. By comparing other structures and performing simulations, the BM structure has better linearity while ensuring its sensitivity is concluded. The BM structure is used to reflect light, and the dual-fiber collimator is used to transmit and receive light. The measurement range of the sensor is from 0KPa to 10KPa. The intensity demodulation makes the whole system easier to realize and ensures the performance of the sensor. By setting up the sensor experimental platform and conducting experiments, the sensitivity of the designed sensor is −0.252db/KPa.