Large-scale growth of few-layer two-dimensional black phosphorus
Zehan Wu,Yongxin Lyu,Yi Zhang,Ran Ding,Beining Zheng,Zhibin Yang,Shu Ping Lau,Xian Hui Chen,Jianhua Hao
DOI: https://doi.org/10.1038/s41563-021-01001-7
IF: 41.2
2021-05-10
Nature Materials
Abstract:Two-dimensional materials provide opportunities for developing semiconductor applications at atomistic thickness to break the limits of silicon technology. Black phosphorus (BP), as a layered semiconductor with controllable bandgap and high carrier mobility, is one of the most promising candidates for transistor devices at atomistic thickness<sup><a href="#ref-CR1">1</a>,<a href="#ref-CR2">2</a>,<a href="#ref-CR3">3</a>,<a href="/articles/s41563-021-01001-7#ref-CR4">4</a></sup>. However, the lack of large-scale growth greatly hinders its development in devices. Here, we report the growth of ultrathin BP on the centimetre scale through pulsed laser deposition. The unique plasma-activated region induced by laser ablation provides highly desirable conditions for BP cluster formation and transportation<sup><a href="/articles/s41563-021-01001-7#ref-CR5">5</a>,<a href="/articles/s41563-021-01001-7#ref-CR6">6</a></sup>, facilitating growth. Furthermore, we fabricated large-scale field-effect transistor arrays on BP films, yielding appealing hole mobility of up to 213 and 617 cm<sup>2</sup> V<sup>−1</sup> s<sup>−1</sup> at 295 and 250 K, respectively. Our results pave the way for further developing BP-based wafer-scale devices with potential applications in the information industry.
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter