Ultra-Low Switching Voltage Induced by Inserting SiO 2 Layer in Indium–Tin–Oxide-Based Resistance Random Access Memory

Chih-Cheng Shih,Wen-Jen Chen,Chang,Tsung-Ming Tsai,Tian-Jian Chu,Yi-Ting Tseng,Cheng-Hsien Wu,Wan-Ching Su,Chen,Hui-Chun Huang,Ming-Hui Wang,Jung-Hui Chen,Jin-Cheng Zheng,Simon M. Sze
DOI: https://doi.org/10.1109/led.2016.2599218
IF: 4.8157
2016-01-01
IEEE Electron Device Letters
Abstract:A lower switching voltage of indium-tinoxide (ITO)-based resistance random access memory (RRAM) with an inserted SiO2 thin film was presented. The amplitude of switching voltage of device was below 0.2 V whether measured by direct current or alternating current sweep operation. Notably, the observed reset voltage increased with temperature. To clarify the switching mechanism, conduction current fitting and switching voltage statistics were applied to explore the regular voltage variation dependent on temperature. In addition, a reaction model was proposed to explain the oxygen concentration gradient induced between the inserted SiO2 and ITO electrode on the ITO-based RRAM device.
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