Characterization of Oxygen Accumulation in Indium-Tin-Oxide for Resistance Random Access Memory

Rui Zhang,Chang,Tsung-Ming Tsai,Syuan-Yong Huang,Wen-Jen Chen,Kai-Huang Chen,Jen-Chung Lou,Jung-Hui Chen,Tai-Fa Young,Chen,Hsin-Lu Chen,Shu-Ping Liang,Yong-En Syu,Simon M. Sze
DOI: https://doi.org/10.1109/led.2014.2316806
IF: 4.8157
2014-01-01
IEEE Electron Device Letters
Abstract:In this letter, we report the oxygen accumulation effect and its influence on resistive switching for gadolinium-doped silicon dioxide (Gd:SiO2) resistance random access memory (RRAM). We find that oxygen absorbance by indium-tin-oxide electrode affects the conduction current mechanism, and remarkably modifies the device performance of RRAM devices. By current fitting, Schottky emission can be observed in both low and high resistance states, from which conduction model is proposed to clarify the oxygen accumulation phenomenon. Reliability tests, including endurance and high temperature retention are further carried out, evaluating the significance of oxygen accumulation effect in redox reaction for RRAM devices.
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