Characteristics and Mechanisms of Silicon-Oxide-Based Resistance Random Access Memory

kuanchang chang,tsungming tsai,tingchang chang,hsinghua wu,yongen syu,gengwei chang,tianjian chu,guanru liu,yuting su,minchen chen,jhihhong pan,jianyu chen,chengwei tung,huichun huang,yahsiang tai,dershin gan,s m sze
DOI: https://doi.org/10.1109/LED.2013.2241725
2013-01-01
Abstract:Traditionally, a large number of silicon oxide materials are extensively used as various dielectrics for semiconductor industries. In general, silicon oxide cannot be used as resistance random access memory (RRAM) due to its insulating electrical properties. In this letter, we have successfully produced resistive switching and forming-free behaviors by zinc doped into silicon oxide. The current-voltage fitting data show that current transport mechanism is governed by Poole-Frenkel behavior in high-resistance state and Ohm's law in low-resistance state, consisting with filament theory. Additionally, good endurance and retention reliabilities are exhibited in the zinc-doped silicon oxide RRAM.
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