Study on Fabrication of Microring Resonant Filter

徐元哲,马春生,闫欣,张大明,王菲
2004-01-01
Laser & Optoelectronics Progress
Abstract:The basic principle of the single-microring resonant flier is discussed. During the fabrication process of the micro-resonator, spirt coating, vaporizing, photolithography, and reactive ion etching are introduced indetail. The cladding material is poly-methyl-methacrylate- co-glyciclyl methacrylate (PMMA-GMA) and the core material is the mixture of PMMA-GMA and bis-phonel-A epoxy. The refractive index of copolymer could be adjusted by varying the composition ratio of the PMMA-GMA and bis-phonel-A epoxy. The results of experiments are presented.
What problem does this paper attempt to address?