Microstructure and Crystallization Kinetics of Ge 2 Sb 2 Te 5 –sn Phase Change Materials

Qixun Yin,Leng Chen
DOI: https://doi.org/10.1007/s10854-018-9746-0
2018-01-01
Journal of Materials Science Materials in Electronics
Abstract:In this paper, the effects of Sn doping on the microstructure and electrical properties of amorphous and crystalline Ge 2 Sb 2 Te 5 thin films are reported. The thin films bonding states are measured through X-ray photoelectron spectroscopy (XPS) and micro-Raman spectroscopy, which prove that the bonding states of Ge 2 Sb 2 Te 5 –Sn thin films regularly change with the additions of various Sn contents. Sn atoms alter the chemical surrounding of Te atoms significantly, having a low impact on the bonding environment of Sb atoms, since the additional Sn atoms bond with Te atoms and lead to the SnTe phase formation. Both the homogeneity of bonding characteristics and crystallinity in Ge 2 Sb 2 Te 5 –Sn thin films are improved. The atomic arrangement of the crystalline states Ge 2 Sb 2 Te 5 –Sn thin films is also obtained. It could be inferred that the Sn addition lead to higher crystalline interplanar spacing and arrangement of many disordered atoms. Furthermore, the corresponding activation energy value ( E A ) of Ge 2 Sb 2 Te 5 –Sn thin films is calculated. This display that the E A values of Ge 2 Sb 2 Te 5 –Sn increase compared to the pure Ge 2 Sb 2 Te 5 thin films, since the Ge 2 Sb 2 Te 5 –Sn thin film structures are stabilized due to the compressed bonds and various bonding states.
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