Crystallization Kinetics of Amorphous Ga–Sb–Te Chalcogenide Films: Part I. Nonisothermal Studies by Differential Scanning Calorimetry

Lee Chain-Ming,Lin Yeong-Iuan,Chin Tsung-Shune
DOI: https://doi.org/10.1557/jmr.2004.0378
2004-01-01
Abstract:Nonisothermal crystallization kinetics of amorphous chalcogenide Ga–Sb–Te films with compositions along the pseudo-binary tie-lines connecting Sb_7Te_3-GaSb and Sb_2Te_3–GaSb of the ternary phase diagram were investigated by means of differential scanning calorimetry. Powder samples were prepared firstly by film deposition using a co-sputtering method; the films were then stripped from the substrate. The activation energy ( E _a) and rate factor ( K _o) were evaluated from the heating rate dependency of the crystallization temperature using the Kissinger method. The kinetic exponent ( n ) was deduced from the exothermic peak integrals using the Ozawa method. The crystallization temperature ( T _x = 181 to 327 °C) and activation energy ( E _a= 2.8 to 6.5 eV) increased monotonically with increasing GaSb content andreached a maximum value in compositions located at the vicinity of GaSb. The kinetic exponent is temperature dependent and shows higher values in the SbTe-rich compositions. Promising media compositions worthy of further studies were identified through the determined kinetics parameters.
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