Fluorination-Enabled Monolithic Integration of Enhancement-and Depletion-Mode Indium-Gallium-Zinc Oxide TFTs

Zhuoqun Feng,Lei Lu,Sisi Wang,Jiapeng Li,Zhihe Xia,Hoi Sing Kwok,Man Wong
DOI: https://doi.org/10.1109/led.2018.2818949
IF: 4.8157
2018-01-01
IEEE Electron Device Letters
Abstract:Common metal-oxide thin-film transistors (TFTs) are unipolar (n-type) in nature, operating either in the enhancement-mode (EM) or depletion-mode (DM). A simple technology allowing easy monolithic integration of both EM and DM TFTs is desirable for improved performance of a metal-oxide circuit. In this letter, the channel regions of select TFTs in a circuit were fluorinated. These TFTs remained EM when subjected to a heat-treatment in a non-oxidizing atmosphere, while the rest was turned DM. The difference between the threshold voltage of an EM and a DM TFT can be simply and precisely modulated by controlling the heat-treatment temperature and duration. An inverter monolithically constructed of EM and DM indium-gallium-zinc oxide TFTs is presented as a demonstration.
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