RTN based oxygen vacancy probing method for Ox-RRAM reliability characterization and its application in tail bits

P. Huang,D. B. Zhu,C. Liu,Z. Zhou,Z. Dong,H. Jiang,W. S. Shen,L. F. Liu,X. Y. Liu,J. F. Kang
DOI: https://doi.org/10.1109/iedm.2017.8268435
2017-01-01
Abstract:Physical mechanism for Random-telegraph-noise (RTN) in oxide based resistive switching memory (Ox-RRAM) is proposed with new insight that the noticeable current fluctuation is attributed to the activation and deactivation of oxygen vacancy (V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">O</sub> ) in the filament gap region. Based on the mechanism, RTN based V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">O</sub> probing method is first proposed to analyze properties of each V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">O</sub> and detect the V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">O</sub> count in the filament gap region. The proposed method can establish a connection between the microcosmic VO properties and the Ox-RRAM reliability. Using the proposed V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">O</sub> probing method, we revealed that the tail bits of high resistance state originate from the redundant VO generation in the filament gap region in the ineffective RESET phase. Furthermore, an optimized operation scheme is presented to suppress the tail bits.
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