Silicon Based Photonic Crystal Nanobeam Cavity with Polymer Cladding

Yuguang Zhang,Yaocheng Shi

DOI: https://doi.org/10.1364/cleo_at.2017.jw2a.119

2017-01-01

Abstract:Silicon based photonic crystal nanobeam cavities with polymer cladding have been investigated. We experimentally demonstrate the temperature insensitive photonic crystal (PhC) nanobeam cavity, the post-trimming of the PhC cavity and a high-sensitivity temperature sensor, respectively.

What problem does this paper attempt to address?

High-Q Photonic Crystal Nanobeam Cavities on Silicon

Yaocheng Shi

DOI: https://doi.org/10.1109/piers.2016.7735232

2016-01-01

Abstract:Photonic crystal (PhC) nanobeam cavities have attracted increasing attention owing to the advantages of high Q-factor, small mode volume and no limitation of FSR. Various PhC cavities have been developed for optical communications, optical sensors, optomechanics, etc.. We investigate the design, fabrication, and experimental characterization of high quality factor PhCnanobeam cavities on silicon. The results show that PhCnanobeam cavities have the potential to ful?ll the aforementioned requirements and form a building block for achieving on-chip optical filtering and sensing applications.
High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Ping Yu,Huiye Qiu,Hui Yu,Feiqing Wu,Zhuoyuan Wang,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1109/lpt.2016.2581205

IF: 2.6

2016-01-01

IEEE Photonics Technology Letters

Abstract:We demonstrate the design, fabrication, and characterization of side-coupled airmode nanobeam photonic crystal cavities in silicon-on-insulator platform. Results show that repeatable devices achieve similar high loaded quality factors (>10(4)) and large optical energy ratio in low refractive region. The unload Q-factors of the fabricated cavities are estimated to exceed 10(5). With side-coupled configuration, high transmission of through port is achieved with typical insertion loss less than 0.5 dB. Wavelength shifts of the measured resonances with respect to the designed values are observed and well explained by considering the fluctuation of etching depth. The demonstrated side-coupled airmode nanobeam photonic crystal cavities may find their applications in ultracompact integrated photonics, especially for on-chip photonic sensor, notch filter, or optical switch.
High Sensitivity Temperature Sensor Based on Cascaded Silicon Photonic Crystal Nanobeam Cavities

Yuguang Zhang,Penghao Liu,Senlin Zhang,Weixi Liu,Jingye Chen,Yaocheng Shi

DOI: https://doi.org/10.1364/oe.24.023037

IF: 3.8

2016-01-01

Optics Express

Abstract:We present the design, fabrication and characterization of a high sensitivity temperature sensor based on cascaded silicon photonic crystal (PhC) nanobeam cavities. Two PhC nanobeam cavities, one with stack width modulated structure and the other one with parabolic-beam structure are utilized to increase the sensitivity. Most of the light is designed to be confined in the cladding and the core for these two cavities, respectively. Due to the positive thermo-optic (TO) coefficient of silicon and the negative TO coefficient of SU-8 cladding, the wavelength responses red shift for parabolic-beam cavity and blue shift for stack width modulated cavity as the increase of the ambient temperature, respectively. Thus, the sensitivity for the temperature sensor can be improved greatly since the difference in resonant wavelength shifts is detected for the temperature sensing. The experimental results show that the sensitivity of the temperature sensor is about 162.9 pm/degrees C, which is almost twice as high as that of the conventional silicon based resonator sensors. (C)2016 Optical Society of America
Temperature Insensitive Lower-Index-Mode Photonic Crystal Nanobeam Cavity

Yuguang Zhang,Yaocheng Shi

DOI: https://doi.org/10.1364/ol.40.000264

2015-01-01

Abstract:We present the design, fabrication, and characterization of a temperature insensitive lower-index-mode photonic crystal (PhC) nanobeam (NB) cavity by overlaying SU-8 cladding. The lower-index-mode is utilized to control the amount of light confined in the SU-8 cladding to compensate for the thermo-optic effect of silicon. The temperature sensitivity of the PhC NB cavity can be tuned by changing the radius of the air holes. The temperature dependence of the PhC NB cavity with SU-8 cladding is demonstrated to be 5.1 pm/degrees C over 50 degrees C temperature range. The measured quality factor of the temperature insensitive lower-index-mode PhC NB cavity is similar to 1 x 10(4). (C) 2015 Optical Society of America
Ultra-Low Power Consumption Tunable Photonic Crystal Nanobeam Cavity Based on Suspended Ridge Waveguides

Yuguang Zhang,Yaocheng Shi

DOI: https://doi.org/10.1109/inec.2016.7589347

2016-01-01

Abstract:We present the design of an ultra-low power consumption tunable photonic crystal (PhC) nanobeam cavity. The simulated temperature dependence of the PhC cavity is about 79 pm/K, due to the high thermo-optic coefficient of silicon. And the calculated tuning efficiency of the tunable PhC cavity is 45.8 pm/μW, which is the highest efficiency ever reported.
High-Q Weakly Modulated Nanobeam Cavity Based On A Suspended Silicon Dioxide Waveguide

Senlin Zhang,Sailing He

2014-01-01

Abstract:Photonic crystal (PhC) cavities have drawn plenty of attentions during the past several decades for the advantages of ultra-high Q factor and small mode volume. PhC cavities have various applications such as quantum information processing, low threshold lasers, optomechanics, and nonlinear optics. PhC cavities based on silicon material have been heavily investigated due to their compatibility with complementary metal-oxide-semiconductor (CMOS) technology, small feature size and low cost. However, apart from the advantage of high Q factor, silicon based PhC cavities suffer from the drawbacks of high insertion loss because of the mode mismatch with fiber and relatively low sensitivity especially for the sensing application. On the other hand, silicon dioxide (silica) waveguide experience relatively smaller loss and owns a similar refractive index to numerous liquid materials to be detected, which will leads to high sensitivity for a silica based PhC cavity sensor. In this paper, we propose a high Q factor (Q = 15500) silica based PhC nanobeam cavity with high sensitivity (the wavelength shift per refractive index unit (RIU) is S = 338 nm/RIU) at the telecommunication wavelength (1550 nm). Since the refractive index contrast for silica waveguide is low for the realization of the photonic bandgaps, it is essential to utilize a silica waveguide suspended in free space. The PhC nanobeam cavity is then formed by etching a series of elliptical holes, whose dimensions linearly decrease from the center to both ends, directly into the silica waveguide. For the sake of high transmission on-resonance wavelength while maintaining high Q factor, it's important to etch partly into the waveguide, which results in a low-refractive-index perturbation structure. The calculated on-resonance transmission is about 0.26. The novel proposed PhC nanobeam cavity shows a sensitivity 3 times larger than the one based on silicon counterparts and outperforms other low index-contrast PhC cavities by a higher on-resonance transmission. Such a structure can also be used in spectrally filtering system and nonlinear optics.
Post-trimming of photonic crystal nanobeam cavities by controlled electron beam exposure.

Yuguang Zhang,Yaocheng Shi

DOI: https://doi.org/10.1364/OE.24.012542

IF: 3.8

2016-01-01

Optics Express

Abstract:We theoretically and experimentally demonstrated that the resonant wavelength of photonic crystal (PhC) nanobeam cavities can be individually post tuned by selective electron beam exposure and development. By exposing the SU-8 cladding with different doses, the thickness of the SU-8 can be precisely and individually controlled from 150 nm to 650 nm. The phenomenon is employed in the localized control of the cladding layer from above the cavity region, thereby modifying the resonant wavelengths. The transmission spectrums of the PhC nanobeam cavities are measured before exposure, after exposure and after development, respectively. Utilizing the proposed method, the resonant wavelengths of the PhC nanobeam cavities can be post-tuned as large as 30 nm. This method is applicable to the post-trimming adjustment of the frequency response of the silicon-photonic filters. (c) 2016 Optical Society of America
High-Q and High-Sensitivity Photonic Crystal Cavity Sensor

Yuguang Zhang,Shoubao Han,Senlin Zhang,Penghao Liu,Yaocheng Shi

DOI: https://doi.org/10.1109/JPHOT.2015.2469131

IF: 2.4

2015-01-01

IEEE Photonics Journal

Abstract:We present the design, fabrication, and the characterization of a high-qualityfactor (Q) and high-sensitivity photonic crystal (PhC) cavity sensor on the silicon-on-insulator platform. By optimizing the structure of the PhC cavity, most of the light can be distributed in the lower index region; thus, the sensitivity can be dramatically improved. The transmission spectrum of the PhC cavity sensor i...
Slotted photonic crystal nanobeam cavity with parabolic modulated width stack for refractive index sensing.

Peipeng Xu,Kaiyuan Yao,Jiajiu Zheng,Xiaowei Guan,Yaocheng Shi

DOI: https://doi.org/10.1364/OE.21.026908

IF: 3.8

2013-01-01

Optics Express

Abstract:We present the design, fabrication, and the characterization of high-Q slotted 1D photonic crystal (PhC) cavities with parabolic-width stack. Their peculiar geometry enables the location of the resonating mode close to the air-band. The majority of optical field distributes in the slotted low-index area and the light matter interaction with the analytes has been enhanced. Cavities with measured Q-factors similar to 10(4) have been demonstrated. The refractive index sensing measurement for NaCl solutions with different concentrations shows a sensitivity around 410. Both the achieved Q-factor and the sensitivity are higher than the one reported recently by using 2D slotted PhC cavities. The total size for the sensing part of the present device is reduced to 16.8 x 2.5 mu m(2). (C)2013 Optical Society of America.
An Improved Surface-Plasmonic Nanobeam Cavity for Higher Q and Smaller V

Ping Yu,Biao Qi,Chao Xu,Ting Hu,XiaoQing Jiang,MingHua Wang,JianYi Yang

DOI: https://doi.org/10.1007/s11434-012-5350-5

2012-01-01

Abstract:We demonstrate a high-Q hybrid surface-plasmon-polariton-photonic crystal (SP3C) nanobeam cavity. The proposed cavities are analyzed numerically using the three-dimensional finite difference time domain (3D-FDTD) method. The results show that a Q-factor of 2076 and a modal volume V of 0.16(λ/2n)3 can be achieved in a 50 nm silica-gap hybrid SP3C nanobeam cavity when it operates at telecommunications wavelengths and at room temperature. V can be further reduced to 0.02(λ/2n)3 when the silica thickness decreases to 10 nm, which leads to a Q/V ratio that is 11 times that of the corresponding plasmonic-photonic nanobeam cavity (without silica). The ultrahigh Q/V ratio originates from the low-loss nature and deep sub-wavelength confinement of the hybrid plasmonic waveguide, as well as the mode gap effect used to reduce the radiation loss. The proposed structure is fully compatible with semiconductor fabrication techniques and could lead to a wide range of applications.
Analysis and Design of Refractive Index Biosensors Based on Single Silicon Nanobeam Cavity

Ping Yu,Huiye Qiu,Wanjun Wang,Ting Hu,Hui Yu,Zhuoyuan Wang,Feiqing Wu,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1109/jphot.2016.2614501

IF: 2.4

2016-01-01

IEEE Photonics Journal

Abstract:Single silicon nanobeam photonic crystal cavity based sensors are systematically analyzed and designed. By using perturbation theory and numerical simulations, both dielectric-mode and air-mode cavities are extensively investigated in terms of sensitivity (S), figure of merit (FOM), detection limit (DL), footprint size, and coupling scheme. The analytical study reveals a sensitivity limit of 1176 nm/RIU and a maximum figure of merit of 5070 for nanobeam cavity based sensors, due to the absorption of light near 1550 nm wavelength. when water is used as the carrier fluid. Design of high FOM (> 4800) nanobeam cavities is demonstrated with S of 291 and 232 nm/RIU for air modes and dielectric modes, respectively. The calculation results indicate that on a 220-nm-thick-silicon SOI platform, it is possible to design a nanobeam cavity based biosensor with DL on the order of 4 × 10-6 RIU, insertion loss of -30 dB, and cavity length less than 40a (a is the lattice constant). To approach the absorption bounded DL, the presented design is adequate when analyte absorption dominates the loss, regardless if it is for dielectric modes or air modes. These results would be conducive to clarification of the confusion on the priority of air mode and dielectric mode in designing nanobeam cavities based sensors, as well as recent considerable efforts to maximize Sand FOM.
Analysis of Electrooptic Modulator With 1-D Slotted Photonic Crystal Nanobeam Cavity

Biao Qi,Ping Yu.,Yubo Li,Xiaoqing Jiang,Mei Yang,Jianyi Yang

DOI: https://doi.org/10.1109/LPT.2011.2148704

2011-01-01

Abstract:A new nanocavity-based electrooptic modulator on silicon-on-insulator is proposed. This nanocavity is formed by a one-dimensional photonic crystal nanobeam cavity with a slot embedded. The slot lies in both the cavity and the distributed Bragg reflectors region. This results in an ultrasmall modal volume of 0.047 (λ/n)3 and a high Q-factor of 8.6×104. Another advantage of the structure is that polymers can be infiltrated into the slot. Accordingly, we rely on the fast and strong electrooptic effect of polymers, rather than on the free-carrier plasma dispersion effect of silicon. Analysis shows a modulator with a bandwidth of 86 GHz, a switching voltage of 0.2 V, and a length of only 14 μm can be obtained.
Temperature Insensitive Slotted Air-Mode Photonic Crystal Cavity

Yuguang Zhang,Yaocheng Shi

DOI: https://doi.org/10.1364/oedi.2014.of4a.6

2014-01-01

Abstract:We propose a temperature insensitive slotted air-mode photonic crystal (PhC) cavity. Highly temperature independent performance simulated to be less than 2pm/K over large temperature range can be achieved by overlaying a PMMA cladding.
High-Q Antisymmetric Multimode Nanobeam Photonic Crystal Cavities in Silicon Waveguides

Ping Yu,Huiye Qiu,Rui Cheng,Lukas Chrostowski,Jianyi Yang

DOI: https://doi.org/10.1364/oe.26.026196

IF: 3.8

2018-01-01

Optics Express

Abstract:Antisymmetric multimode nanobeam photonic crystal cavities (AM-NPCs) are proposed and demonstrated in this paper. Due to transverse symmetry-breaking of the antisymmetric multimode periodic waveguide, anti-crossing of the fundamental mode and 1st-order mode is realized and confirmed by band structure calculation. Two-mode filtering and reflection-free cavity filters based on this characteristic are demonstrated. Experimental results on silicon-on-insulator platform shows that broadband (> 100 nm) reflection suppression (< -10 dB) and high-Q (7 × 104) AM-NPCs can be achieved using existed design methodology and fabrication facility. We also explain resonance splitting of the measured transmission spectra and find resonance-enhanced mode-conversion phenomena in the AM-NPCs.
Ultrahigh thermal-efficient all-optical silicon photonic crystal nanobeam cavity modulator with TPA-induced thermo-optic effect

Zhi Jiang,Yong Zhang,Han Xie,Xuetao Gan,Genquan Han,Yue Hao,DanYang Yao,Tong Wang,jianguo wang,Liu Yan

DOI: https://doi.org/10.1364/ol.485678

IF: 3.6

2023-04-25

Optics Letters

Abstract:Danyang Yao, Zhi Jiang, Yong Zhang, Han Xie, Tongtong Wang, Jianguo Wang, Xuetao Gan, Genquan Han, Yan Liu, Yue Hao We propose and experimentally demonstrate an on-chip all-optical silicon photonic crystal nanobeam cavity (PCNBC) modulator. With the ... [Opt. Lett. 48, 2325-2328 (2023)]

optics
Photonic crystal nanobeam lasers

Yinan Zhang,Mughees Khan,Yong Huang,Jae-Hyun Ryou,Parag Deotare,Russell Dupuis,Marko Loncar

DOI: https://doi.org/10.1063/1.3475397

2010-02-12

Abstract:Photonic crystal lasers operating at room temperature based on high Q/V nanobeam cavities have been demonstrated. We reported a large spontaneous emission factor (~0.97) by fitting the L-L curve with the rate equations.

Optics
Cladding-free efficiently tunable nanobeam cavity with nanotentacles.

Jianhao Zhang,Sailing He

DOI: https://doi.org/10.1364/OE.25.012541

IF: 3.8

2017-01-01

Optics Express

Abstract:We propose a cladding-free, efficiently tunable, high-quality factor (Q) nanobeam cavity with subwavelength-period nanotentacles (NT), adequately investigate the performance of the cavity, and study the directional heat transfer. By virtue of the excellent heat transfer of Si nanotentacles, a tuning range of more than 6 nm wavelength, with 24mW and 10 KHz switching rate, and 13 mu s raising time is experimentally obtained. This result is about twentyfold better than the previous work by Fegadolli [ACS Photon. 2, 470-474 (2015)]. A potential 12nm tuning range with identical power is also theoretically suggested by modifying the silicon structure. With an optimized design, these nanotentacles are demonstrated to have a minimal effect to the cavity and are available to serve as photonic waveguides. This cladding-free design, with a simple fabrication process, is comparable to other proposals in which deep etching, suspended treatment, and troublesome heterogeneous-integration may be needed. Finally but importantly, this smart design can be applied to other photonic cavities, particularly cavities such as ring/disk resonators, in which we reasonably predict a better tuning efficiency due to the thermal circulation. We believe this design is fairly suitable for applications in which light-matter interaction is of primary importance, such as sensing, particle trapping, cavity quantum electrodynamics (CQED), and III-V/Si hybrid lasers with external cavities. (C) 2017 Optical Society of America
Photonic crystal cavities in silicon dioxide

Yiyang Gong,Jelena Vučković

DOI: https://doi.org/10.1063/1.3297877

IF: 4

2010-01-18

Applied Physics Letters

Abstract:One dimensional nanobeam photonic crystal cavities fabricated in silicon dioxide are considered in both simulation and experiment. Quality factors of over 104 are found via simulation, while quality factors of over 5×103 are found in experiment, for cavities with mode volumes of 2.0(λ/n)3 and in the visible wavelength range 600–716 nm. The dependences of the cavity quality factor and mode volume for different design parameters are also considered.

physics, applied
High- Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide

Yu Ping,Qiu Chen,Hu Ting,Qiu Hui-Ye,Ge Fang-Fang,Jiang Xiao-Qing,Yang Jian-Yi

DOI: https://doi.org/10.1088/0256-307x/30/10/104204

2013-01-01

Abstract:We demonstrate experimentally a high-Q one-dimensional photonic crystal cavity in a widely-used 450 × 220nm single mode silicon ridge waveguide. Transmission spectrum measurement is performed by using the vertical fiber-grating coupling characterization method. The Q factor up to 2.6 × 104 is found by fitting the line shape of the transmission spectrum, and the normalized transmission of nearly 20% is achieved. Three-dimensional finite difference time domain calculations show that the modal volume of the fundamental mode is 1.1(λ/n)3. With the standard silicon waveguide width, the demonstrated 1D PhC cavity may be used as a building block for integrated photonic circuits and on-chip sensing applications.
Ultracompact High-Sensitivity Biochemical Sensor Built with Photonic Crystal Nanobeam Cavity

Yaocheng Shi

DOI: https://doi.org/10.1109/inec.2016.7589338

2016-01-01

Abstract:For the utilization as sensors, photonic crystal (PhC) cavities with strong light matter interaction between the optical fields and the analytes are preferred. However, there is a trade-off between sensitivity (S) and quality factor (Q): the optical mode should be distributed more into the target analytes to achieve a higher S; while in order to obtain a high Q, the confinement of the optical mode in the wave-guiding medium have to be large. We demonstrated ultracompact high-sensitivity biochemical sensors utilizing high-Q PhC nanobeam cavities.

Silicon Based Photonic Crystal Nanobeam Cavity with Polymer Cladding

High-Q Photonic Crystal Nanobeam Cavities on Silicon

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

High Sensitivity Temperature Sensor Based on Cascaded Silicon Photonic Crystal Nanobeam Cavities

Temperature Insensitive Lower-Index-Mode Photonic Crystal Nanobeam Cavity

Ultra-Low Power Consumption Tunable Photonic Crystal Nanobeam Cavity Based on Suspended Ridge Waveguides

High-Q Weakly Modulated Nanobeam Cavity Based On A Suspended Silicon Dioxide Waveguide

Post-trimming of photonic crystal nanobeam cavities by controlled electron beam exposure.

High-Q and High-Sensitivity Photonic Crystal Cavity Sensor

Slotted photonic crystal nanobeam cavity with parabolic modulated width stack for refractive index sensing.

An Improved Surface-Plasmonic Nanobeam Cavity for Higher Q and Smaller V

Analysis and Design of Refractive Index Biosensors Based on Single Silicon Nanobeam Cavity

Analysis of Electrooptic Modulator With 1-D Slotted Photonic Crystal Nanobeam Cavity

Temperature Insensitive Slotted Air-Mode Photonic Crystal Cavity

High-Q Antisymmetric Multimode Nanobeam Photonic Crystal Cavities in Silicon Waveguides

Ultrahigh thermal-efficient all-optical silicon photonic crystal nanobeam cavity modulator with TPA-induced thermo-optic effect

Photonic crystal nanobeam lasers

Cladding-free efficiently tunable nanobeam cavity with nanotentacles.

Photonic crystal cavities in silicon dioxide

High- Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide

Ultracompact High-Sensitivity Biochemical Sensor Built with Photonic Crystal Nanobeam Cavity