Abstract:Photonic crystal (PhC) cavities have drawn plenty of attentions during the past several decades for the advantages of ultra-high Q factor and small mode volume. PhC cavities have various applications such as quantum information processing, low threshold lasers, optomechanics, and nonlinear optics. PhC cavities based on silicon material have been heavily investigated due to their compatibility with complementary metal-oxide-semiconductor (CMOS) technology, small feature size and low cost. However, apart from the advantage of high Q factor, silicon based PhC cavities suffer from the drawbacks of high insertion loss because of the mode mismatch with fiber and relatively low sensitivity especially for the sensing application. On the other hand, silicon dioxide (silica) waveguide experience relatively smaller loss and owns a similar refractive index to numerous liquid materials to be detected, which will leads to high sensitivity for a silica based PhC cavity sensor. In this paper, we propose a high Q factor (Q = 15500) silica based PhC nanobeam cavity with high sensitivity (the wavelength shift per refractive index unit (RIU) is S = 338 nm/RIU) at the telecommunication wavelength (1550 nm). Since the refractive index contrast for silica waveguide is low for the realization of the photonic bandgaps, it is essential to utilize a silica waveguide suspended in free space. The PhC nanobeam cavity is then formed by etching a series of elliptical holes, whose dimensions linearly decrease from the center to both ends, directly into the silica waveguide. For the sake of high transmission on-resonance wavelength while maintaining high Q factor, it's important to etch partly into the waveguide, which results in a low-refractive-index perturbation structure. The calculated on-resonance transmission is about 0.26. The novel proposed PhC nanobeam cavity shows a sensitivity 3 times larger than the one based on silicon counterparts and outperforms other low index-contrast PhC cavities by a higher on-resonance transmission. Such a structure can also be used in spectrally filtering system and nonlinear optics.

Temperature Insensitive Lower-Index-Mode Photonic Crystal Nanobeam Cavity

Silicon Based Photonic Crystal Nanobeam Cavity with Polymer Cladding

Temperature Insensitive Slotted Air-Mode Photonic Crystal Cavity

Ultra-Low Power Consumption Tunable Photonic Crystal Nanobeam Cavity Based on Suspended Ridge Waveguides

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Post-trimming of photonic crystal nanobeam cavities by controlled electron beam exposure.

High Sensitivity Temperature Sensor Based on Cascaded Silicon Photonic Crystal Nanobeam Cavities

Low-index-mode Photonic Crystal Nanobeam Cavity for Refractive Index Sensing at the 2 Μm Wavelength Band.

Refractive Index Insensitive Temperature Sensor Based On A Photonic Crystal Nanobeam Cavity

High-Q Weakly Modulated Nanobeam Cavity Based On A Suspended Silicon Dioxide Waveguide

Side-coupled Nanoscale Photonic Crystal Structure with High-Q and High-Stability for Simultaneous Refractive Index and Temperature Sensing

Slotted photonic crystal nanobeam cavity with parabolic modulated width stack for refractive index sensing.

Simultaneous Detection of Refractive Index and Temperature Using High-Order Air and Dielectric Modes in a Single Photonic Crystal Nanobeam Cavity

Ultra-Compact Air-Mode Photonic Crystal Nanobeam Cavity Integrated with Bandstop Filter for Refractive Index Sensing

Simultaneous Measurement of Refractive Index and Temperature Using Cascaded Side-Coupled Photonic Crystal Nanobeam Cavities

An Improved Surface-Plasmonic Nanobeam Cavity for Higher Q and Smaller V

High-Q Photonic Crystal Nanobeam Cavities on Silicon

Analysis and Design of Refractive Index Biosensors Based on Single Silicon Nanobeam Cavity

Tunable Ultra‐Narrow Linewidth Light Source Through Liquid Crystal‐Assisted Mini‐Bound‐States‐In‐Continuum Cavities

High-Q Antisymmetric Multimode Nanobeam Photonic Crystal Cavities in Silicon Waveguides

Compact dual-parameter sensor design based on a photonic crystal nanobeam cavity with chirped slotted annular holes.