Abstract:Photonic crystal (PhC) cavities have drawn plenty of attentions during the past several decades for the advantages of ultra-high Q factor and small mode volume. PhC cavities have various applications such as quantum information processing, low threshold lasers, optomechanics, and nonlinear optics. PhC cavities based on silicon material have been heavily investigated due to their compatibility with complementary metal-oxide-semiconductor (CMOS) technology, small feature size and low cost. However, apart from the advantage of high Q factor, silicon based PhC cavities suffer from the drawbacks of high insertion loss because of the mode mismatch with fiber and relatively low sensitivity especially for the sensing application. On the other hand, silicon dioxide (silica) waveguide experience relatively smaller loss and owns a similar refractive index to numerous liquid materials to be detected, which will leads to high sensitivity for a silica based PhC cavity sensor. In this paper, we propose a high Q factor (Q = 15500) silica based PhC nanobeam cavity with high sensitivity (the wavelength shift per refractive index unit (RIU) is S = 338 nm/RIU) at the telecommunication wavelength (1550 nm). Since the refractive index contrast for silica waveguide is low for the realization of the photonic bandgaps, it is essential to utilize a silica waveguide suspended in free space. The PhC nanobeam cavity is then formed by etching a series of elliptical holes, whose dimensions linearly decrease from the center to both ends, directly into the silica waveguide. For the sake of high transmission on-resonance wavelength while maintaining high Q factor, it's important to etch partly into the waveguide, which results in a low-refractive-index perturbation structure. The calculated on-resonance transmission is about 0.26. The novel proposed PhC nanobeam cavity shows a sensitivity 3 times larger than the one based on silicon counterparts and outperforms other low index-contrast PhC cavities by a higher on-resonance transmission. Such a structure can also be used in spectrally filtering system and nonlinear optics.

Post-trimming of photonic crystal nanobeam cavities by controlled electron beam exposure.

Post-fabrication Trimming of Photonic Crystal Nanobeam Cavities by Electron Beam Irradiation

Post-Processing Trimming of Silicon Photonic Devices Using Femtosecond Laser.

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Temperature Insensitive Lower-Index-Mode Photonic Crystal Nanobeam Cavity

Dynamically Reconfigurable Photonic Crystal Nanobeam Cavities

Silicon Based Photonic Crystal Nanobeam Cavity with Polymer Cladding

An Improved Surface-Plasmonic Nanobeam Cavity for Higher Q and Smaller V

Cladding-free efficiently tunable nanobeam cavity with nanotentacles.

High-Q Photonic Crystal Nanobeam Cavities on Silicon

High-Q Antisymmetric Multimode Nanobeam Photonic Crystal Cavities in Silicon Waveguides

Tailoring Mode Splitting and Degeneracy in Silicon Triply Resonant Nanobeam Cavities

Tailoring of Circularly Polarized Beams Employing Bound States in the Continuum in a Designed Photonic Crystal Metasurface Nanostructure

Slotted photonic crystal nanobeam cavity with parabolic modulated width stack for refractive index sensing.

Ultra-Low Power Consumption Tunable Photonic Crystal Nanobeam Cavity Based on Suspended Ridge Waveguides

Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide

Low-loss Tunable 1-D ITO-slot Photonic Crystal Nanobeam Cavity

Controlled Cavity QED and Single-Photon Emission Using a Photonic-Crystal Waveguide Cavity System

Nanoscale multi-beam lithography of photonic crystals with ultrafast laser

High-Q Weakly Modulated Nanobeam Cavity Based On A Suspended Silicon Dioxide Waveguide

Photonic crystal nanobeam/micro-ring hybrid-cavities for optical trapping