Experimental and Numerical Study on the Power and Fluid Flow during the Silicon Crystal Growth Process by Cz Method

Chao-hua JIN,Tong ZHU
DOI: https://doi.org/10.3969/j.issn.1000-985X.2014.06.024
2014-01-01
Abstract:A two-dimensional global model of 120 KG silicon furnace with heating system was simulated.Through the simulation of separated temperature field and coupled temperature with flow field,the required power was obtained about different models of crystal growth.The two sets of simulated values were compared with experimental data,power loss of the fluid flow has been generated.While the crystal growth process had been simulated,then got the distribution of temperature field and melt flow about crystal growth process.The results show that the power consumption due to the fluid flow accounts for about 21.6% of the actual power.
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