The Effect of Physical Property Parameters of the Insulation Material Inside the Heat Shield on the Growth of Czochralski Silicon Crystal
Rongrong Hu,Xuekang Lv,Jiacheng Li,Salamat Ali,Jing Qi
DOI: https://doi.org/10.1007/s12633-023-02778-9
IF: 3.4
2023-11-29
Silicon
Abstract:The main method for producing single silicon crystal is the Czochralski (CZ) method, which is widely utilized to grow high-quality, large-size semiconductor crystals. The ideal physical property parameters of the materials that build the various parts of the crystal growth furnace can optimize the thermal field distribution during the crystal growth process. It also can improve the crystal quality and reduce the energy consumption. In this work, we study the effect of physical property parameters, including thermal conductivity, specific heat, and density of the insulation material inside the heat shield, on the global thermal field during the crystal growth process. The results show that the thermal conductivity significantly affects the deflection of the melt-crystal (m-c) interface, the thermal stress, the axial temperature gradient in the crystal, and the heater power. The deflection of the m-c interface increases with increasing thermal conductivity. The thermal stress increases with the increase of the interface deflection, which will have an impact on the crystal quality. The axial temperature gradient in the crystal increases with decreasing thermal conductivity. In contrast, the temperature distribution in the melt shows no significant change, which will increase the output of the single silicon crystal and ultimately reduce the production cost. Meanwhile, the heater power decreases with decreasing thermal conductivity. The material's specific heat and density magnitudes show almost no effect on these parameters. Our results suggest that selecting insulation materials inside the heat shield with low thermal conductivity can improve the crystal quality and reduce the production cost.
materials science, multidisciplinary,chemistry, physical