A Study on the Optical Constants of Cu Bulk and Cu Films

孙兆奇,蔡琪,何玉平,宋学萍
DOI: https://doi.org/10.3969/j.issn.1000-2162.2004.02.007
2004-01-01
Abstract:The optical constants of Cu bulk and sputtering Cu films were studied in details by employing a reflecting spectroscopic ellipsometer. The results show that our n, k curves are identical on the whole in shape but different in numeric value comparing with Robert's bulk data and Johnson's thick film data. In the range of 250~830nm, the refractive index n for Cu bulk and films varies between 0.1 and 1.5, and the extinction coefficient k varies from 1.5 to 5.0. As film thickness increases n raises and k reduces. The optical constants of thick film are closer to those of bulk. The relation between optical constants and microstructure is discussed as well.
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