A 9.45mhz Micromechanical Disk Resonator with Movable Electrodes for Gap Reduction

Xinyi Li,Jingfu Bao,Yulin Huang,Yuan Ling,Yingbin Zheng,Yijia Du
DOI: https://doi.org/10.1016/j.sna.2016.03.010
IF: 4.291
2016-01-01
Sensors and Actuators A Physical
Abstract:A micro-electromechanical wine glass modal disk resonator with movable electrodes is presented in this paper. The movable electrodes were driven by electrostatic force for gap reduction to reduce insertion loss. By reducing the gap from 2.5 mu m to 0.5 mu m, the insertion loss improved from -104 dB to -81 dB at the same bias voltage of 20 V. However, unstable movable electrodes caused the quality factor to decrease from 920,000 to 27,200. (C) 2016 Published by Elsevier B.V.
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