Micromanipulation transfer of membrane resonators for circuit optomechanics

Maria Berdova,Sung Un Cho,Juha-Matti Pirkkalainen,Jaakko Sulkko,Xuefeng Song,Pertti J. Hakonen,Mika A. Sillanpaa
DOI: https://doi.org/10.1088/0960-1317/23/12/125024
2013-07-05
Abstract:A capacitive coupling between mechanical resonator and a microwave cavity enables readout and manipulation of the vibrations. We present a setup to carry out such experiments with aluminum membranes fabricated as stamps and transferred in place with micromanipulation. The membrane is held in place by van der Waals forces, and is supported by three microscopic points. We measure the lowest mechanical modes, and conclude the membrane vibrates as an essentially free-free resonator. Sliding clamping conditions are identified via a softening Duffing nonlinearity. The method will enable reduction of clamping losses, while maintaining a narrow vacuum gap for strong capacitive coupling.
Mesoscale and Nanoscale Physics
What problem does this paper attempt to address?