Superconducting Membrane Mechanical Oscillator Based on Vacuum-Gap Capacitor

Yong-Chao Li,Xin Dai,Jun-Liang Jiang,Jia-Zheng Pan,Xing-Yu Wei,Ya-Peng Lu,Sheng Lu,Xue-Cou Tu,Guo-Zhu Sun,Pei-Heng Wu
DOI: https://doi.org/10.1088/1674-1056/27/6/060701
2018-01-01
Abstract:Using the diluted S1813 UV photoresist as a sacrificial layer, we successfully fabricate a superconducting suspended parallel-plate capacitor, in which the top layer of aluminum film acts as a membrane mechanical resonator. Together with a superconducting octagonal spiral inductor, this parallel-plate capacitor constitutes a superconducting microwave resonator. At m K temperature, the transmission characteristic and spectrum of the microwave resonator are measured.Sideband frequencies caused by the vibration of the membrane mechanical resonator are clearly demonstrated. By downconverting with a mixer, the dependence of fundamental frequency and its harmonics on the input microwave power are clearly demonstrated, which is consistent with the numerical simulation.
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