Abstract:High performance Microelectromechanical system (MEMS) gyroscopes are in great demand in the fields of precise navigation, automatic driving and precise attitude measurement. Honeycomb disk resonator gyroscope(HDRG) which works on wineglass-modes has many advantages including higher immunity to fabrication errors, better resonant mode consistency and better inner electrode arrangement, showing excellent potentials to be the next-generation MEMS gyroscope with high performance and good robustness. In this paper, a new HDRG prototype is designed based on the comprehensive optimizations of resonant structure and electrode configuration. The main structure parameters and the lumped-mass configuration are optimized systematically through the finite element simulation, while the configuration and arrangement of the inner electrodes are optimized based on the vibration amplification effect, offering systematic reference for the optimizations of other MEMS gyroscopes. The new HDRG is fabricated through a SOI fabrication technique and tested with a close-loop digital circuit. Quality factor of the optimized HDRG prototype reaches 650k, proving to be a record in silicon disk resonator gyroscopes. The bias instability of the optimized gyroscope reaches 0.015°/h under room temperature without any compensation, approaching the accuracy of navigation grade. Scale factor nonlinearity reached around 120ppm in the range of ±300°/s without compensation. The comprehensive performance is at the forefront of MEMS resonant gyroscopes.

Design, Fabrication and Characterization of Disk Resonator Gyroscope with Vibration and Shock Resistance

Structure Design and Structural Parameter Optimization of Fully Symmetric Vibratory Gyroscope

A Bulk Micromachined Gyroscope With Improved Quality-Factors At Atmospheric Pressure

An Electrostatically-driven Capacitively-sensed Frame Microgyroscope Fabricated with an Improved Process Flow

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

0.015 Degree-Per-Hour Honeycomb Disk Resonator Gyroscope

Design and optimization of a resonant output frequency gyroscope for robust sensitivity and bandwidth performance

Dynamic Modeling of the Multiring Disk Resonator Gyroscope

A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope With 0.42°/h Bias Instability Within ±300°/s Full Scale

Nonlinearity Reduction in Disk Resonator Gyroscopes Based on the Vibration Amplification Effect

Broadband Source-Driven Resonant Micro-Optic Gyroscope Based on a Multi-Turn Waveguide-Type Ring Resonator

A MEMS Disk Gyroscope with High Fabrication Precision, High Quality Factor (>810k) and High Overload Characteristic (>15000g)

High Finesse Silica Waveguide Ring Resonators for Resonant Micro-Optic Gyroscopes

Design and Optimization of a Vibrating Ring Gyroscope With High Shock Resistance by Differential Evolution

Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator

Silica Waveguide-Type Ring Resonators for Resonant Micro-Optic Gyroscopes

Resonant Micro-Optic Gyro Using a Short and High-Finesse Fiber Ring Resonator

Design, Fabrication, and Characterization of a Multicurved Surface Fusion Metal Resonant Gyroscope

Performance Improvement of a Resonant Fiber Optic Gyroscope with a Hybrid Photonic Crystal Fiber Ring Resonator.

Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Single-Polarization Fiber-Pigtailed High-Finesse Silica Waveguide Ring Resonator for A Resonant Micro-Optic Gyroscope