Abstract:Micro- and nano-resonators have important applications including sensing, navigation, and biochemical detection. Their performance is quantified using the quality factor $Q$, which gives the ratio of the energy stored to the energy dissipated per cycle. Metallic glasses are a promising materials class for micro- and nano-scale resonators since they are amorphous and can be fabricated precisely into complex shapes on these lengthscales. To understand the intrinsic dissipation mechanisms that ultimately limit large $Q$-values in metallic glasses, we perform molecular dynamics simulations to model metallic glass resonators subjected to bending vibrations. We calculate the vibrational density of states, redistribution of energy from the fundamental mode of vibration, and $Q$ versus the kinetic energy per atom $K$ of the excitation. In the linear and nonlinear response regimes where there are no atomic rearrangements, we find that $Q \rightarrow \infty$ (since we do not consider coupling to the environment). We identify a characteristic $K_r$ above which atomic rearrangements occur, and there is significant energy leakage from the fundamental mode to higher frequencies, causing finite $Q$. Thus, $K_r$ is a critical parameter determining resonator performance. We show that $K_r$ decreases as a power-law, $K_r\sim N^{-k},$ with increasing system size $N$, where $k \approx 1.3$. We estimate the critical strain $\langle \gamma_r \rangle \sim 10^{-8}$ for micron-sized resonators below which atomic rearrangements do not occur, and thus large $Q$-values can be obtained when they are operated below $\gamma_r$. We find that $K_r$ for amorphous resonators is comparable to that for resonators with crystalline order.

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Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Microscale Glass-Blown Three-Dimensional Spherical Shell Resonators

Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator

Frequency split suppression of fused silica micro shell resonator based on rotating forming process

Intrinsic dissipation mechanisms in metallic glass resonators

Effects of laterally heterogeneous slip on the resonance properties of quartz crystals immersed in liquids.

High-Q Mid-Infrared Chalcogenide Glass Resonators

On the degeneracy of whispering gallery modes in a high-Q sapphire microwave resonator

Reconfigurable frequency-selective resonance splitting in chalcogenide microring resonators

Spontaneous Symmetry Breaking in an Ultrahigh-Q Microcavity

Low-frequency excess vibrational modes in two-dimensional glasses

Ultra-high-Q tunable whispering-gallery-mode microresonator

Acoustic resonance in periodically sheared glass

Poisson ratio and excess low-frequency vibrational states in glasses

Achieving mode detection and precise mechanical trimming of uncoated micro shell resonator using interdigital electrode

Frequency tuning of the whispering gallery modes of silica microspheres for CQED and spectroscopy

The Effects of Offset on Quality Factor of MEMS Wine-Glass Resonator

Nanomechanical resonators with ultra-high-$Q$ perimeter modes

Low-frequency hybridized excess vibrations of two-dimensional glasses

Manufacturing Fused Silica Hemispherical Resonators Using Polymer Glass Suspension and Replication Molding