Enhancement of Positive Bias Stress Stability for IGZO TFTs by A CAAC Gd-AZO Bulk Layer

Junchen Dong,Huijin Li,Zhen Luo,Xing Zhang,Dedong Han,Yi Wang
DOI: https://doi.org/10.1109/edssc.2018.8487165
2018-01-01
Abstract:A c-axis-aligned crystalline Gd-Al-Zn-O (CAAC Gd-AZO) layer is implemented at the interface between the active layer and dielectric to enhance positive gate bias stress (PBS) stability of In-Ga-Zn-O thin film transistors (IGZO TFTs). The Gd-AZO bulk layer diminishes the root-mean-square (RMS) roughness of the IGZO back channel layer, which leads to the smaller threshold voltage shift (ΔV T ) of the Gd-AZO/IGZO TFTs than the IGZO/IGZO TFTs.
What problem does this paper attempt to address?