10-kV 4H-SiC Gate Turn-OFF Thyristors With Space-Modulated Buffer Trench Three-Step JTE

Cai-Neng Zhou,Ruifeng Yue,Yan Wang,Jian Zhang,Gang Dai,Juntao Li
DOI: https://doi.org/10.1109/LED.2018.2849829
IF: 4.8157
2018-01-01
IEEE Electron Device Letters
Abstract:Ultrahigh-voltage 4H-silicon carbide (SiC) gate turn-OFF thyristors (GTOs), with multiple space-modulated buffer trench (SMBT) regions on the traditional three-step junction termination extension (3S-JTE), have been investigated and fabricated. With the adoption of these SMBT regions, the electric field crowding near the edges is effectively suppressed and the sensitivity of edge maximum electric ...
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