Si Tip with Integrated Nano-Channel: Self-heated and Self-Current-limited Field Electron Emitter

Zhijun Huang,Yifeng Huang,Zhangxu Pan,Juncong She,Shaozhi Deng,Jun Chen,Ningsheng Xu
DOI: https://doi.org/10.1109/ivnc.2017.8051561
2017-01-01
Abstract:We report the featured field electron emitter of Si tip with individually integrated nano-channel. A rational procedure was developed to fabricate the uniform integrated device. The Si nano-channel can limit both current and heat flow. The heat resistance of the nano-channel resulted in the heat accumulation at the tip apex, inducing the thermally assisted field electron emission. The negative feedback effect of the current resistance can suppress the short pulse current “runaway” and thus improve the stability and reliability. The self-heated and self-current-limited integrated devices show a higher current density emission and good device reliability.
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