Abstract:The size tunability and chemical versatility of nanostructures enable electron sources of high brightness and temporal coherence, both of which are important characteristics for high-resolution electron microscopy(1-3). Despite intensive research efforts in the field, so far, only conventional field emitters based on a bulk tungsten (W) needle have been able to yield atomic-resolution images. The absence of viable alternatives is in part caused by insufficient fabrication precision for nanostructured sources, which require an alignment precision of subdegree angular deviation of a nanometre-sized emission area with the macroscopic emitter axis(4). To overcome this challenge, in this work we micro-engineered a LaB6 nanowire-based electron source that emitted a highly collimated electron beam with good lateral and angular alignment. We integrated a passive collimator structure into the support needle tip for the LaB6 nanowire emitter. The collimator formed an axially symmetric electric field around the emission tip of the nanowire. Furthermore, by means of micromanipulation, the support needle tip was bent to align the emitted electron beam with the emitter axis. After installation in an aberration-corrected transmission electron microscope, we characterized the performance of the electron source in a vacuum of 10(-8) Pa and achieved atomic resolution in both broad-beam and probe-forming modes at 60 kV beam energy. The natural, unmonochromated 0.20 eV electron energy loss spectroscopy resolution, 20% probe-forming efficiency and 0.4% probe current peak-to-peak noise ratio paired with modest vacuum requirements make the LaB6 nanowire-based electron source an attractive alternative to the standard W-based sources for low-cost electron beam instruments.

Point field emission electron source with a magnetically focused electron beam

Carbon Nanotubes As Field Emission Sources

Hot electron field emission via individually transistor-ballasted carbon nanotube arrays.

Lab6 Tip-Modified Multiwalled Carbon Nanotube As High Quality Field Emission Electron Source

An ultrabright and monochromatic electron point source made of a LaB 6 nanowire

Superconducting Niobium Tip Electron Beam Source

Fabrication of Carbon Nanotube Lateral Field Emitters

Carbon Nanotubes And Their Potential Field Emission Applications

Laser microstructuring of Si surfaces for low-threshold field-electron emission

Si Tip with Integrated Nano-Channel: Self-heated and Self-Current-limited Field Electron Emitter

Novel Nanostructured Carbon Nanotube Electron Sources

High-Performance Field Emitters Based on SiC Nanowires with Designed Electron Emission Sites

Lateral Field Emitters Fabricated Using Carbon Nanotubes

High Emission Current Density, Vertically Aligned Carbon Nanotube Mesh, Field Emitter Array

Nano electron source fabricated by beam-induced deposition and its unique feature

Sub-cycle Nanotip Field Emission of Electrons Driven by Air Plasma Generated THz Pulses

Fabrication and Characterization of Single Carbon Nanotube Emitters As Point Electron Sources

B13-P-03 Fabrication and Characterization of Silicon Field Emission Tips for Miniature Field Emission Electron Microscope

High-endurance Micro-Engineered LaB6 Nanowire Electron Source for High-Resolution Electron Microscopy

A Gold Needle Tip Array Ultrafast Electron Source with High Beam Quality

Bright spatially coherent beam from carbon-nanotube fiber field-emission cathode