Self-modulated Field Electron Emitter: Gated Device of Integrated Si Tip-on-nano-channel

Zhijun Huang,Yifeng Huang,Zhangxu Pan,Juncong She,Shaozhi Deng,Jun Chen,Ningsheng Xu
DOI: https://doi.org/10.1063/1.4971336
IF: 4
2016-01-01
Applied Physics Letters
Abstract:We report the featured gated field electron emission devices of Si nano-tips with individually integrated Si nano-channels and the interpretation of the related physics. A rational procedure was developed to fabricate the uniform integrated devices. The electrical and thermal conduction tests demonstrated that the Si nano-channel can limit both the current and heat flows. The integrated devices showed the specialties of self-enhancement and self-regulation. The heat resistance results in the heat accumulation at the tip-apex, inducing the thermally enhanced field electron emission. The self-regulated effect of the electrical resistance is benefit for impeding the current overloading and prevents the emitters from a catastrophic breakdown. The nano-channel-integrated Si nano-tip array exhibited emission current density up to 24.9 mA/cm2 at a gate voltage of 94 V, much higher than that of the Si nano-tip array without an integrated nano-channel.
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