Study on Silicon Nanopillars with Ultralow Broadband Reflectivity Via Maskless Reactive Ion Etching at Room Temperature

Yi Huang,Wensheng Yan,Xinyu Tan,Lijun He
DOI: https://doi.org/10.1016/j.mseb.2017.06.013
IF: 3.407
2017-01-01
Materials Science and Engineering B
Abstract:Nanostructured silicon with low surface reflectivity has important application prospects in a wide range. We fabricate crystalline silicon nanopillars with ultralow broadband reflectivity via maskless reactive ion etching at room temperature. The measurements show that the silicon nanopillars are in nano-scale diameter and micron-scale height with tip ends, which show extremely powerful antireflection capability. The silicon nanopillars with the heights of 5 gm and 7 gm demonstrate ultralow weighted average reflectivity of 0.80% and 0.40%, respectively, in a wide wavelength range of 300-1030 nm. Additional SiNX coating reduces the reflectivity to 0.09%. The two-dimensional weighted average reflectivity as function of angle of incidence and wavelength is measured, which shows low sensitivity to angle of incidence in the range of 0 degrees-70 degrees. The calculated wavelength dependent reflectance is in good agreement with the measured result in the range of 300-1030 nm. (C) 2017 Elsevier B.V. All rights reserved.
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