Abstract:Fused silica is widely used in aerospace and precision integrated micro-optical sensors due to its high hardness, low coefficient of thermal expansion, high transmittance properties and high chemical stability in harsh environments. Due to the amorphous characteristics, fused silica wet etching is isotropic and cannot realize specific structural functional devices; dry etching process is complex, costly, and relatively low productivity. These characteristics make the processing of fused silica extremely difficult, with high cost and low yield. Femtosecond laser processing has been widely used in the processing of complex and fine three-dimensional structure of fused silica due to its wide adaptability of materials, high degree of processing fineness and non-mask processing technology, but the surface of the processed surface is relatively rough. Fine micro-optical devices can be realized by wet-assisted femtosecond laser processing. In this study, microstructural patterns were fabricated on fused silica using a tightly focused femtosecond laser by means of a self-developed ultrafast laser processing instrumentation. By controlling the laser processing parameters and the etching time of HF solution to realize the precise modulation of linewidth, period and height of the grating, one/two dimensional gratings, and the Fresnel zone plates with circular and elliptical focal points and the biomimetic compound eye microlens array were successfully fabricated. Finally, the performance of the fabricated optical components were characterized, which were comparable to theoretical simulation values. The results show that the total diffraction efficiency of the fused silica gratings fabricated using this method reaches 85.5%; the Fresnel zone plates and the bionic compound eye microlens array have good focusing effects. This study provides a reference method for the fine micromachining of hard materials such as fused silica, and provides a theoretical basis for its engineering application.

Micro-Channel Etching Characteristics Enhancement by Femtosecond Laser Processing High-Temperature Lattice in Fused Silica Glass

Etching Rate Enhancement by Shaped Femtosecond Pulse Train Electron Dynamics Control for Microchannels Fabrication in Fused Silica Glass.

High-throughput Microchannel Fabrication in Fused Silica by Temporally Shaped Femtosecond Laser Bessel-beam-assisted Chemical Etching.

Investigation on Femtosecond Laser-Assisted Microfabrication in Silica Glasses

Experimental study on direct fabrication of micro channel on fused silica by picosecond laser

Fabrication of Microchannels on Silica Glass by Femtosecond Laser Multi-Scan： from Surface Generation Mechanism to Morphology Control

Thermal process of silica glass microchannels fabricated by femtosecond laser ablation

Femtosecond Laser Induced Selective Etching in Fused Silica: Optimization of the Inscription Conditions with a High-Repetition-rate Laser Source.

Direct Fabrication of Homogeneous Microfluidic Channels Embedded in Fused Silica Using a Femtosecond Laser

Research of Femtosecond Laser-Assisted Etching of Fused Silica Micro-Optics Devices

Ablation Enhancement of Fused Silica Glass by Femtosecond Laser Double-Pulse Bessel Beam

Fabrication of millimeter-scale deep microchannels in fused silica by femtosecond laser filamentation effect

Experimental Investigation on Processing of Fused Silica Microchannels by High Repetition Rate Femtosecond Laser

Enhancement of laser induced damage threshold of fused silica by acid etching combined with UV laser conditioning

Study on the Machining Mechanism of Fabrication of Micro Channels in Fused Silica Substrates by Laser-Induced Plasma

Research on Laser-Assisted Micro-Milling of Fused Silica

Improving Uv Laser Damage Threshold Of Fused Silica Optics By Wet Chemical Etching Technique

Microchannel Fabrication in Fused Quartz by Backside Laser-Induced Plasma Ablation Using 248 Nm KrF Excimer Laser

Fabrication of Three-Dimensional Microfluidic Channels in Glass by Femtosecond Pulses

Hybrid Laser Microfabrication of Three-Dimensional Large-Scale Fused Silica Microfluidic Chips

Micro-nano fabrication of femtosecond laser wet etch