Abstract:A Q-switched Nd: YAG laser was used to fabricate micro channels in the fused silica substrate by laser-induced plasma. The micro channels were observed with fluorescence microscope, no thermal cracks around the channels and the depth of the channels is up to 4 mm. There are coagulation layers around the inner surface. We studied the ionization mechanism of optical breakdown in solids by nanosecond laser pulses. For the 1064 nm laser, as the intensity of nanosecond pulse is not enough large, plasma formation in optical breakdown is the result of an electron avalanche process. We got the plasma formation model using the breakdown threshold of avalanche ionization and calculated the range of laser plasma based on the model. The theoretical analysis based on the model is shown to be mainly agreement with the experimental observations. The laser-supported detonation wave (LSDW) based on the principle of hydrodynamics was analyzed as well and calculated the characteristic parameters of plasma including the plasma temperature, pressure and velocity. The characteristics of micro channels were analyzed through the parameters. When the plasma passed, the melting quartz solidified with the effect of LSDW and produced the coagulation layers. The ablation of the high temperature and pressure plasma lead to a micro channel of high quality with a relatively smooth internal surface and no thermal cracks.

Experimental study on direct fabrication of micro channel on fused silica by picosecond laser

Experimental Investigation on Processing of Fused Silica Microchannels by High Repetition Rate Femtosecond Laser

Fabrication of Microchannels on Silica Glass by Femtosecond Laser Multi-Scan： from Surface Generation Mechanism to Morphology Control

Fabrication of millimeter-scale deep microchannels in fused silica by femtosecond laser filamentation effect

Study on the Machining Mechanism of Fabrication of Micro Channels in Fused Silica Substrates by Laser-Induced Plasma

Micro-Channel Etching Characteristics Enhancement by Femtosecond Laser Processing High-Temperature Lattice in Fused Silica Glass

Investigation on Femtosecond Laser-Assisted Microfabrication in Silica Glasses

Etching Rate Enhancement by Shaped Femtosecond Pulse Train Electron Dynamics Control for Microchannels Fabrication in Fused Silica Glass.

Material Removal Effect of Microchannel Processing by Femtosecond Laser

Femtosecond Laser Microchannels Fabrication Based on Electrons Dynamics Control Using Temporally or Spatially Shaped Pulses

Experimental Research on CO_2 Laser Direct-writing Machining PMMA Microchannel

High-throughput Microchannel Fabrication in Fused Silica by Temporally Shaped Femtosecond Laser Bessel-beam-assisted Chemical Etching.

Microchannel Fabrication in Fused Quartz by Backside Laser-Induced Plasma Ablation Using 248 Nm KrF Excimer Laser

Study on Microchannel Fabrication Technology by Femtosecond Laser Micromachining in Transparent Materials

Thermal process of silica glass microchannels fabricated by femtosecond laser ablation

Direct Fabrication of Homogeneous Microfluidic Channels Embedded in Fused Silica Using a Femtosecond Laser

Fabrication of Three-Dimensional Microfluidic Channels in Glass by Femtosecond Pulses

Liquid-assisted Femtosecond Laser Drilling of Straight and Three-Dimensional Microchannels in Glass

Transparent Materials Microprocessing by Nanosecond Ultraviolet Laser

Influence of Processing Parameters on the Structure Size of Microchannel Processed by Femtosecond Laser

Fabrication of microfluidic on fused silica glass surface assisted by femtosecond laser