Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

High-profile-quality microchannels fabricated by UV picosecond laser for microfluidic mixing

Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Micro Etching Method Inside Microchannels

A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding.

Fabrication of microchannels by space-selective control of phase separation in glass.

Rapid method for design and fabrication of passive micromixers in microfluidic devices using a direct-printing process.

Laser-Induced Bubble Dynamics Optimization for High-Aspect-Ratio 3D Micro-Fluidic Channels Fabrication

High-quality fabrication of diamond straight microchannels heat sink with large aspect ratio microchannels using UV nanosecond laser based on multi-feed method

3D Multi-Microchannel Helical Mixer Fabricated by Femtosecond Laser inside Fused Silica

Experimental Research on CO_2 Laser Direct-writing Machining PMMA Microchannel

Preparation of hybrid soda-lime/quartz glass chips with wettability-patterned channels for manipulation of flow profiles in droplet-based analytical systems.

High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

Optimized Holographic Femtosecond Laser Patterning Method Towards Rapid Integration of High-Quality Functional Devices in Microchannels.

3D large-scale fused silica microfluidic chips enabled by hybrid laser microfabrication for continuous-flow UV photochemical synthesis

Fabrication of micro pin fins on inclined V-shaped microchannel walls via laser micromilling

Milliseconds Mixing in Microfluidic Channel Using Focused Surface Acoustic Wave

A compact and efficient three-dimensional microfluidic mixer

Femtosecond Laser Fabrication of Microchannels in Transparent Hard Materials

Laser Ablation and Injection Moulding as Techniques for Producing Micro Channels Compatible with Small Angle X-Ray Scattering

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing